Checking method for optical proximity effect correction consistency of layout repetitive units

An optical proximity effect, repeating unit technology, applied in special data processing applications, instruments, electrical digital data processing, etc., can solve problems such as time-consuming, difficult to determine the consistency of tens of millions of graphics, and reduce the variety of differences , Improve work accuracy and efficiency

Active Publication Date: 2017-07-25
SHANGHAI HUALI MICROELECTRONICS CORP
View PDF9 Cites 7 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The current inspection work is mainly through simple inspection by engineers, but it is difficult for engineers to determine whether tens of millions o

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Checking method for optical proximity effect correction consistency of layout repetitive units
  • Checking method for optical proximity effect correction consistency of layout repetitive units
  • Checking method for optical proximity effect correction consistency of layout repetitive units

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0025] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0026] Please refer to figure 1 , the present invention provides a method for checking consistency of layout repeating unit optical proximity effect correction, comprising the following steps:

[0027] Step 1: Provide an original design of the layout, and screen the area that needs to be operated on the layout. First, filter out the area containing repeating units in the original design, and then irradiate the exposure light source on the layout during exposure. Since the light source has an optical radius d, the general range is 0 μm to 2 μm, then the projection on the layout will form a ring-shaped area 201 caused by the optical radius d, remove the ring-shaped area 201, and use the remaining area after removing the ring-shaped area ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Radiusaaaaaaaaaa
Login to view more

Abstract

The invention provides a checking method for optical proximity effect correction consistency of layout repetitive units. According to the method, first, a graphic library containing original design layers corresponding to all datum graphs and layers obtained after the original design layers are corrected by the optical proximity effect is established; second, xor operation is performed on the original design layers corresponding to all the datum graphs in the graphic library, the layer obtained after the original design layer corresponding to the datum graph which is completely and successfully matched with each region of original design of a layout is corrected by the optical proximity effect and the layers obtained after the original design layers corresponding to all the datum graphs in the graphic library are corrected by the optical proximity effect, and differences and corresponding difference values are obtained; and last, the differences with the difference values greater than an acceptable difference value are classified to reduce difference types. In this way, ten millions of differences can be reduced into several or tens of differences, and the accuracy and efficiency of correction consistency checking work in a repetitive region of layout design correction work are greatly improved.

Description

technical field [0001] The invention relates to the field of graphic design for manufacturability, in particular to a consistency check method for optical proximity effect correction of layout repeating units. Background technique [0002] Generally speaking, the design data in the layout design of an integrated circuit contains highly repetitive designs, such as the storage area of ​​a logic chip and the photosensitive area of ​​a camera chip. In order to ensure that the signals in the integrated circuit can be kept consistent, it is necessary to require that the layout data of all the graphics can still maintain a high degree of uniformity after each optical proximity effect processing. [0003] Errors in the design itself or the optical proximity effect correction software are likely to cause inconsistent correction results of repeated graphics. With the continuous advancement of the process nodes of integrated circuits, the correction difference of repeated patterns has...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G06F17/50
CPCG06F30/398
Inventor 朱忠华阚欢魏芳朱骏张旭升
Owner SHANGHAI HUALI MICROELECTRONICS CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products