High-accuracy and three-dimensional laser exposure curing process
A technology of three-dimensional laser and solidification process, which is applied in the direction of microlithography exposure equipment, photo-plate-making process of pattern surface, and photo-plate-making process exposure device, etc., which can solve the problems of widespread promotion of unfavorable equipment, increased equipment cost, and high maintenance cost. Achieve high-speed zoom, ensure accuracy and high efficiency, and change quickly
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[0033] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0034] see figure 1 with figure 2 , a high-precision three-dimensional laser exposure curing process 1 of the present invention includes the following steps,
[0035] S1: Read the three-dimensional vector diagram of the object to be processed; and import the read three-dimensional vector diagram information into the memory of the laser processing equipment for storage;
[0036] S2: Calculate the three-dimensional exposure path of the object to be processed according to the three-dimensional vector diagram information obtained in step S1, and perform three-dimensional path interpolation according...
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