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High-accuracy and three-dimensional laser exposure curing process

A technology of three-dimensional laser and solidification process, which is applied in the direction of microlithography exposure equipment, photo-plate-making process of pattern surface, and photo-plate-making process exposure device, etc., which can solve the problems of widespread promotion of unfavorable equipment, increased equipment cost, and high maintenance cost. Achieve high-speed zoom, ensure accuracy and high efficiency, and change quickly

Active Publication Date: 2017-08-08
SHENZHEN SUPERTECH LASER TECH CO LTD
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Problems solved by technology

[0007] In the process of laser exposure curing, for non-planar structures, it is necessary to quickly and flexibly adjust the height and size of the focus spot to form a curved surface, so that the processing can be completed smoothly. However, for this situation, the general solution is to use Different laser processing heads adjust the height of each processing head separately to produce a curved focal plane. This design not only greatly increases the cost of the equipment, but also has high maintenance costs and complicated operation, which is not conducive to the widespread promotion of the equipment.

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[0033] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0034] see figure 1 with figure 2 , a high-precision three-dimensional laser exposure curing process 1 of the present invention includes the following steps,

[0035] S1: Read the three-dimensional vector diagram of the object to be processed; and import the read three-dimensional vector diagram information into the memory of the laser processing equipment for storage;

[0036] S2: Calculate the three-dimensional exposure path of the object to be processed according to the three-dimensional vector diagram information obtained in step S1, and perform three-dimensional path interpolation according...

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Abstract

The invention provides a high-accuracy and three-dimensional laser exposure curing process. The high-accuracy and three-dimensional laser exposure curing process comprises the following steps of S1, reading a three-dimensional vector diagram of an object to be processed; S2, calculating a three-dimensional exposure path of the object to be processed, and performing three-dimensional path interpolation according to the three-dimensional vector diagram; S3, calculating the distance between a beam expander and a three-dimensional dynamic focusing galvanometer in an optical axis direction in each time point laser processing equipment during actual processing according to the three-dimensional exposure path and parameter information of each lens in an optical path system of the laser processing equipment; S4, fixing the object to be processed in a three-dimensional rotation fixture system in the laser processing equipment; and S5, starting the laser processing equipment so that the three-dimensional fixture system and the three-dimensional dynamic focusing system simultaneously run. A high-speed and dynamic Z axis can be flexibly driven during the actual laser curing process, high-speed zoom of a laser spot is achieved; and since the actual focusing surface is a curved surface, the exposure curing process with regard to the cured surface can be achieved very well by employing the process, and high accuracy and high efficiency are ensured.

Description

[0001] [technical field] [0002] The invention relates to the technical field of laser processing technology, in particular to a high-precision three-dimensional laser exposure curing technology with high processing efficiency, short production cycle and high yield rate. [0003] [Background technique] [0004] In recent years, with the rapid development of electronic technology, printed circuit board related technology has been rapidly developed and improved, and it has also been widely used in various fields. Almost all electronic devices contain corresponding printed circuit boards. [0005] In the production process of PCB circuit boards, exposure treatment is a key link in the entire production and processing process. However, the current exposure of circuit boards is generally aimed at curing treatment in a flat state, and the film and dry film are exposed under ultraviolet light. Optical polymerization reaction, the photoinitiator absorbs light energy and decomposes int...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/2055G03F7/70183G03F7/70416
Inventor 朱刚周劼文林海吕俊峰
Owner SHENZHEN SUPERTECH LASER TECH CO LTD
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