Planar optical waveguide, preparation method thereof and thermo-optical device

Abstract

The invention provides a planar optical waveguide, a preparation method thereof and a thermo-optical device. The planar optical waveguide provided by the invention comprises substrate-inorganic material lower cladding-polymer core layer-inorganic material upper cladding, that is, the upper and lower claddings are both made of inorganic materials, and the core layer is a polymer and respectively controls the refractive indexes, thermo-optic coefficients and thermal conductivities of the inorganic material lower cladding, the polymer core layer and the inorganic material upper cladding to obtaina specific relationship of size, so that the optical field is effectively limited in the core layer by fully utilizing the characteristics such as thermal light and thermal conductivity of the inorganic material and the polymer, and the rate of change of the effective refractive index of the entire optical waveguide can be increased, thereby changing the phase of the optical field. The improvement of the characteristics of the above aspects can further effectively reduce the response time of the thermal light, improve the response speed, improve the response sensitivity of thermo-optical device, and is of great significance for obtaining a fast thermo-optical device.

Description

technical field [0001] The invention relates to the field of optical waveguide technology, in particular to a planar optical waveguide, a preparation method thereof and a thermo-optical device. Background technique [0002] An optical waveguide is a dielectric device that guides light waves to propagate in it, also known as a dielectric optical waveguide, which is a guiding structure that transmits optical frequency electromagnetic waves composed of transparent media. The transmission principle of an optical waveguide is different from that of a metal-enclosed waveguide. On the interface of media with different refractive indices, the phenomenon of total reflection of electromagnetic waves confines the light wave to the waveguide and its surrounding limited area. The optical waveguide itself is a multi-faceted scientific integration, so its research and application range is also very wide. The small and compact waveguide structure is conducive to the integration of optical c...

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Problems solved by technology

[0005] Although the inorganic-organic hybrid system waveguide is conducive to the comprehensive utilization of the advantages of the two types of materials, it is not enough to combine the inorganic material system and the organic material system arbitrarily. Various complex factors such as the mutual applicability and matching between materials affect the inorganic Whether the waveguide of the organic hybrid system can be successfully developed and whether it can exert excellent thermo-optic performance, but there is no mature mechanism for how the combination of inorganic and organic materials affects the optical waveguide

[0006] At present, the organic-inorganic hybrid material system mainly uses inorganic materials as the lower cladding, and polymers as the core and upper cladding, such as SiO 2 The lower cladding layer-SU8 core layer-PMMA upper cladding layer, and this organic-inorganic hybrid material optical waveguide does not give full play to the advantages of inorganic materials and polymer materials in thermal conductivity, thermo-optic coefficient, etc., so that the response of the optical waveguide Slower, resulting in less sensitive response of optical waveguide thermo-optical devices

In addition, it requires a high-temperature process to prepare the lower cladding layer. On the one hand, the additional temperature stress will cause fractures when the grown film is too thick; on the other hand, when the temperature is higher than the heat-resistant temperature of the material, the material will begin to decompose, which will cause Device performance is unstable or even damaged

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