Fine mask plate supporting frame, fine mask plate and preparation method thereof

Abstract

The invention relates to the technical field of display preparation, and discloses a support frame of a fine mask, a fine mask and a preparation method thereof, which are used to improve the positional accuracy of an opening area of ​​the mask, thereby improving mask precision. The supporting frame of the fine mask plate includes: a plurality of frames, the plurality of frames enclose the mask area, at least one pair of two frames facing each other is provided with adjustment openings, and each of the adjustment openings is provided with at least An adjustment member, the adjustment member is used to adjust the shape of the corresponding adjustment opening to adjust the deformation of the mask area.

Description

technical field [0001] The invention relates to the technical field of display preparation, in particular to a fine mask support frame, a fine mask and a preparation method thereof. Background technique [0002] At present, OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) adopts a vacuum evaporation technology to prepare an organic light-emitting layer. In the device manufacturing process, organic materials are deposited on the substrate above the evaporation source by high-temperature evaporation. In order to evaporate the organic materials to a specific position according to the design, a high-precision metal mask is required under the substrate. A pre-designed effective opening area is left on the membrane plate (that is, a high-precision metal mask plate), and organic materials are deposited on the back plate through the effective opening area to form a preset pattern. Changes in the size and position of the effective opening area on the metal mask will...

AI Technical Summary

Problems solved by technology

[0004] The welding of the current shielding strips and support strips is completed before the welding of the mask strips, and there is no need to use extrusion force on the mask frame when welding them, but when welding the mask strips, it is necessary to use external force to make the mask The opening 05 on the strip reaches a suitable precision, and correspondingly, the extrusion force needs to be used to act on the mask frame, so that the mask strip can still receive the same tension as before welding after welding (the tension is the recovery deformation of the mask frame The force generated by the mask strip welded on it) to ensure that the effective opening area of ​​the mask strip remains unchanged before and after welding, but the extrusion force set on the mask frame in actual production is always at If the fluctuation is too large or too small, the position accuracy of the effective opening area before welding and after welding is different. The effective opening area after welding sometimes shrinks inward (extrusion force is set too small), and sometimes expands outward ( Extrusion force set too high)

At the same time, as the fine mask is used for a longer period of time, the mask strips that have been welded and formed become looser, and the effective opening area of ​​the fine mask is deformed more, resulting in lower precision of the film layer formed by the fine mask.

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