Magneto-electro-thermal multi-parameter coupling microscope probe and preparation method thereof and detection method thereof

Abstract

The present invention provides a magneto-electro-thermal multi-parameter coupling microscope probe. The magneto-electro-thermal multi-parameter coupling microscope probe comprises a probe arm, a needle tip body connected with the probe arm, and a thermocouple layer, a heat conduction insulation layer and a magnetic conduction layer coat the positions from the probe arm to the surface of the needle tip surface outwards; the thermocouple layer and an external circuit form a thermoelectricity loop; and the magnetic conduction layer, a sample and the external circuit form a conducting loop. The probe is simple in structure and low in preparation, can perform in-situ micro detection of magnetic signals, electrical signals and thermal signals of magnetoelectric function materials, and can effectively avoid the signal interference between the thermoelectricity loop and the conducting loop.

Description

technical field [0001] The invention relates to a probe of a scanning probe microscope, in particular to a magnetic-electric-thermal multi-parameter coupled microscope probe, a preparation method and a detection method thereof. Background technique [0002] With the rapid development of information technology, the electronic components of integrated circuits tend to be miniaturized and integrated. The size of electronic components has entered the micro / nano scale, and its heat generation and heat dissipation problems have become bottlenecks restricting further high integration. Characterizing heat-related physical properties at the micro / nano scale and understanding the physical processes of heat generation and heat dissipation have become a new branch of modern thermal science—micro / nano-scale thermal science. At the micro / nano scale, the microstructure and domain structure (for magnetic and ferroelectric materials) of materials have a particularly important influence on th...

AI Technical Summary

Problems solved by technology

Although people have developed micro-area thermal imaging technology based on scanning probe microscopy, at present, based on this technology, only thermal information can be obtained alone, and it is not possible to simultaneously obtain magnetic domain structure and ferroelectric / piezoelectric domain structure simultaneously in situ and in real time. , conductive domain structure and many other information, especially the correlation between the period is not clear, and magnetic-electric-thermal coupling imaging cannot be performed, which limits the in-depth understanding of the physical mechanism of heat generation and heat dissipation in materials, so that it is impossible to find out the solution of the material. Heat generation and heat dissipation at the micro / nano scale

[0005] The present invention proposes a novel nanometer magnetic-electrical-thermal multi-parameter coupling microscope probe, which will overcome the limitations of the existing single magnetic, electric and thermal functional modules, and develop a probe with both magnetic-electrical-thermal characteristic detection. Equipped with the corresponding signal detection and processing system, it will be able to realize the in-situ characterization of changes in magnetic domains, ferroelectric domains, micro-region conductance, micro-region heating properties and their correlations

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