Solar cell re-doing method

Abstract

The application provides a solar cell re-doing method. The method comprises the following steps: providing a to-be-redone silicon slice, wherein a failed film layer is arranged on the surface of the to-be-redone silicon slice, and the to-be-redone silicon slice is located in a tubular film-coating furnace tube; pumping the gas into the tubular film-coating furnace tube to generate fluorine-containing plasma; removing the failed film layer on the to-be-redone silicon slice by use of the fluorine-containing plasma; and recoating a film on the silicon slice surface after removing the failed film layer. By use of the solar cell redoing method provided by the invention, the failed film layer on the silicon slice surface with failed film coating is removed by use of the dry fluorine-containing plasma, the removing can be directly performed in the tubular film-coating furnace tube without needing other process treatment. In the film recoating, the film can be directly recoated without re-performing the processes of texturing, diffusing and etching; therefore, a lot of redoing time and material cost can be saved. The solar cell re-doing method provided by the embodiment of the invention is simple in process, simple and efficient in step and low in cost.

Description

technical field [0001] The invention relates to the technical field of solar cell production, in particular to a method for reworking solar cells. Background technique [0002] The manufacturing process of solar cells mainly includes: texturing, diffusion, etching, coating, printing and sintering. Among them, the coating process is to create a layer of anti-reflection film on the surface of the silicon wafer. Due to equipment reasons, human reasons or other reasons, the thickness of the anti-reflection film may be too thin or too thick to meet the process standard thickness. Such silicon wafers are called It is a coating failure piece, also known as a silicon wafer to be reworked. [0003] The conventional rework process of silicon wafers to be reworked is wet immersion in HF acid solution, the anti-reflection film is removed by reaction, and then re-textured, diffused, etched, and then coated, which takes a lot of time and material costs. [0004] Therefore, how to reduce...

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Problems solved by technology

[0005] In view of this, the present invention provides a solar cell rework method to solve the problem that in the rework process in the prior art, after removing the anti-reflection film, re-texturing, diffusion, etching, and then coating, it takes a lot of time and materials. cost problem

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