Resonant graphene dual-axis accelerometer

Abstract

The invention discloses a resonant graphene dual-axis accelerometer comprising a substrate, a sensitive mass plate, a graphene resonance beam I, an insulating layer pair I, an excitation electrode pair I, a graphene resonant beam II, an insulating layer pair II, an excitation electrode pair II, a graphene resonant beam III, an insulating layer pair III, an excitation electrode pair III, a graphene resonant beam IV, an insulating layer pair IV, an excitation electrode pair IV and a vacuum cover. According to the invention, on the basis of the composite sensitive acceleration way, acceleration measurement is realized. Only with one sensitive mass plate with different mass blocks, measurement of acceleration speeds in different axial directions in different ranges is realized; detection of accelerated speeds applied by all axes is independent; a coupling effect during simultaneous application of dual-axis acceleration speeds is eliminated; the acceleration measurement accuracy and reliability are enhanced; and dual-axis ultra-high-sensitivity acceleration measurement is realized.

Description

technical field [0001] The invention relates to the technical field of micro / nano electromechanical systems, in particular to a resonant graphene biaxial accelerometer. Background technique [0002] Based on mechanical resonance technology, the sensor realized by the inherent resonance characteristics of the resonant element with the change rule of the measured is called a resonant sensor. The resonant sensor itself is a periodic signal output (quasi-digital signal), which can be converted into a digital signal that is easy for the microprocessor to receive with only a simple digital circuit (not A / D); at the same time, due to the repeatability and resolution of the resonant sensitive unit The force and stability are very good, so the principle of resonance measurement has naturally become the focus of people's research today. [0003] The resonant accelerometer uses the change of the natural frequency of the resonant beam with the measured acceleration to measure the accel...

AI Technical Summary

Problems solved by technology

[0005] For resonant dual-axis accelerometers, the change of resonant frequency caused by off-axis crosstalk not only affects the measurement accuracy and sensitivity of the sensor, but also affects the working stability of the sensor

In practical applications, there are often different ranges of acceleration applied on the orthogonal axis in the same plane. Although the sensitivity to different ranges of acceleration can be changed by changing the size of the graphene resonant beam, it will increase the redundancy of the back-end detection circuit. Due to redundancy and complexity, it is impossible to guarantee the unity of the accelerometer for the orthogonal axis acceleration sensitive structure and detection structure

At the same time, there will be coupling effects between accelerations in different ranges on the orthogonal axis. To improve the independence and accuracy of biaxial acceleration measurement, most of the current methods need to redesign the resonance sensitive structure.

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