A single-excitation two-dimensional ultrasonic vibration-assisted microfabrication platform

Abstract

The invention belongs to the field of ultrasonic processing technology in special processing technology. It discloses a single-excitation two-dimensional ultrasonic vibration-assisted micro-machining platform, which includes a right-angled bottom plate, a linear guide rail, upper and lower vibration blocks, a support plate, and a horn. Energizer, ultrasonic generator. The upper and lower vibrating blocks are arranged perpendicularly to each other along the feed and side cutting directions respectively. The lower vibrating block and the bottom plate, and the lower vibrating block and the upper vibrating block are connected through linear guide rails. The workpiece is fixed on the upper vibrating block through a threaded connection. piece. The vibration block and the horn, and the horn and the transducer are all connected by double-headed studs. Two sets of horns are fixed on the base plate through the support plate at the node. The two sets of transducers are connected to the same ultrasonic generator through wires. They output two ultrasonic signals at the same time and have a phase difference adjustment function. By adjusting the ultrasonic generator The amplitude and phase difference of the output signal are coupled to different elliptical vibration trajectories according to actual needs to achieve high-efficiency and high-precision processing.

Description

technical field

[0001] The invention belongs to the technical field of ultrasonic processing in special processing technology, relates to the field of micromachining assisted by two-dimensional ultrasonic vibration, and particularly relates to a single-excitation two-dimensional ultrasonic vibration assisted micromachining platform. Background technique

[0002] In recent years, ultrasonic machining has been proven to be a special processing method with strong technological advantages, which can effectively reduce cutting force and cutting heat, improve workpiece surface quality and chip formation, and improve machining accuracy, tool durability and machining stability. It can well solve the processing problems of difficult-to-machine materials, non-metal materials, and parts with high surface quality requirements. As an emerging special processing technology, it has attracted extensive attention from domestic and foreign experts and scholars.

[0003] At present, the resear...

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