Aluminum alloy medium and thick plate welding method in semiconductor industry

Abstract

The invention discloses an aluminum alloy medium and thick plate welding method in the semiconductor industry. The method comprises the steps that a friction stir welding technology is adopted for conducting aluminium alloy medium and thick plate welding; for aluminium alloy medium and thick plates with the thickness smaller than 50 mm in the semiconductor industry, a butt joint mode is adopted, the plates are subjected to once external welding to be completely fused, a seamless cavity is formed, and the connector form adopts a straight face or a folded face; for a vacuum cavity with the wall thickness larger than 50 mm in the semiconductor industry, a multi-layer butt joint mode is adopted, after a bottom layer is welded to be fused through once welding, the previous layer is filled with a welding material, the welding material and the aluminium alloy medium and thick plates arranged at the two ends of the previous layer in the semiconductor industry form a straight face or an inclined face, external friction stir welding is conducted to achieve complete fusion, and a seamless cavity is formed. Accordingly, aluminium alloy plates with the thickness exceeding 100 mm can be welded, the machining mode of part of the aluminum alloy cavities in the semiconductor industry are changed into the mode of splicing multiple aluminium alloy plates and then welding the plates to be shaped from the mode of being machined and shaped through a whole material, and raw material consumption is lowered.

Description

Technical field: [0001] The invention relates to the field of welding in the equipment manufacturing industry, in particular to a high-quality aluminum alloy medium and thick plate welding technology in the semiconductor industry, which is suitable for welding aluminum alloy cavities with a plate thickness exceeding 35mm. Background technique: [0002] The wall thickness of the aluminum alloy large cavity in the semiconductor industry is greater than 35mm. In order to ensure its airtightness, some of them are machined and formed by a piece of aluminum material or several plates are formed by internal and external fusion welding. The disadvantage of using a piece of aluminum material for overall machining is waste of material and high machining cost; in the prior art, several plates are used for machining and forming by internal and external melting welding, which requires multi-layer and multi-pass welding or pre-welding before welding. Heating and other welding problems are...

AI Technical Summary

Problems solved by technology

The disadvantage of adopting a piece of aluminum material for integral machining is waste of material and high machining cost; in the prior art, several plates are processed and formed by internal and external melting welding, which requires multi-layer and multi-pass welding or pre-welding before welding. Heating and other welding problems, not only difficult to process, but also less accurate

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