A kind of thermal detector and its preparation method

Abstract

The invention discloses a heat detector and a preparation method thereof. The heat detector comprises a microstructure array, a dielectric layer, a metal layer, a passivation layer and a thermistor layer, wherein the microstructure array, the dielectric layer, the metal layer, the passivation layer and the thermistor layer are sequentially arranged from top to bottom. The microstructure array structure screens the incident light and absorbs the infrared light with a narrow-band spectrum. The infrared light with the narrow-band spectrum is resonant in a resonant cavity, and is converted into a heat signal carrying the intensity of the infrared light with the narrow-band spectrum through the metal layer. The thermistor layer converts the heat signal carrying the intensity of the infrared light with the narrow-band spectrum into a resistance signal carrying the intensity of the infrared light with the narrow-band spectrum. Through demodulating the resistance information of the intensity information of the infrared light with the narrow-band spectrum, the infrared light intensity information of the narrow-band spectrum is obtained.

Description

technical field [0001] The invention belongs to the technical field of uncooled infrared detection, and more specifically relates to a thermal detector and a preparation method thereof. Background technique [0002] The thermal detector converts the temperature difference caused by the object into an electrical signal and obtains its information, essentially sensing the intensity information of the electromagnetic radiation of the target object. According to different detection principles, uncooled detectors are divided into pyroelectric detectors, thermocouple detectors, and thermistor detectors. Among them, microbolometer detectors based on thermistor materials have the advantages of room temperature detection, high integration, large-scale production, and low price. [0003] However, the thermal detector has no perception ability to the wavelength information and polarization information of the electromagnetic field at the pixel level, which leads to the dependence of th...

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Problems solved by technology

[0004] Aiming at the defects of the prior art, the object of the present invention is to provide a thermal detector and its preparation method, which aims to solve the problem of infrared light intensity information detected by the existing thermal detector due to the inability of the existing thermal detector to screen infrared light. In order to contain the infrared light intensity information of multiple polarization forms under a wide spectral range, the technical problem that the infrared intensity detection of the narrow spectral range cannot be realized (the problem solved in claim 1 is that the infrared light detection of the narrow spectral range cannot be realized)

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