Full analytical model construction method of capacitance type wall shear stress sensor probe

A sensor probe and analysis model technology, applied in the field of sensors, can solve problems such as high requirements for professional knowledge and experience, and reduce the efficiency of sensor design, so as to achieve the effect of clear design ideas and improved efficiency

Inactive Publication Date: 2017-12-05
NORTHWESTERN POLYTECHNICAL UNIV +1
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Problems solved by technology

On the one hand, it requires high professional knowledge and experience of d

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  • Full analytical model construction method of capacitance type wall shear stress sensor probe
  • Full analytical model construction method of capacitance type wall shear stress sensor probe
  • Full analytical model construction method of capacitance type wall shear stress sensor probe

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Embodiment Construction

[0054] The present invention will be further described in detail below in conjunction with examples, but the embodiments of the present invention are not limited thereto.

[0055] The capacitive shear stress sensor involved in the present invention needs to use the symbol and explanation thereof in the establishment process of full analytical model:

[0056] L t : the length of the elastic beam;

[0057] d: spacing between adjacent combs;

[0058] W t : the width of the elastic beam;

[0059] λ: bias ratio;

[0060] L e : the length of the floating unit;

[0061] W e : the width of the floating unit;

[0062] L c : overlapping length of comb teeth;

[0063] W c : width of comb teeth;

[0064] t: thickness of the device layer;

[0065] N: number of pairs of comb teeth;

[0066] ε: permittivity in air;

[0067] ρ: manufacturing material mass density;

[0068] E: Modulus of elasticity of the manufacturing material.

[0069] The performance index and meaning descr...

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Abstract

The invention discloses a full analytical model construction method of a capacitance type wall shear stress sensor probe. The capacitance type wall shear stress sensor probe comprises elastic beams (1), a floating unit (2), a base (3), movable comb teeth (4), fixed comb teeth (5), limiting structures (6) and an insulating substrate (7). The model construction method includes the following steps that: shear stress is applied onto the capacitance type wall shear stress sensor probe; and full analytical model construction is performed for the range, inherent frequency, resolution and non-linearity of the capacitance type wall shear stress sensor probe. According to the full analytical model construction method of the capacitance type wall shear stress sensor probe of the invention, the full analytical model of the capacitance type wall shear stress sensor probe is constructed, so that relationships between sensor probe structural parameters and sensor performance indexes can be defined, and therefore, a designer can determine appropriate structural parameters according to the requirements of a user for sensor performance and can obtain a sensor design optimal program in a more targeted manner.

Description

technical field [0001] The invention belongs to the technical field of sensors, and relates to a full analytical model modeling method of a capacitive wall shear stress miniature sensor with a floating unit. Background technique [0002] Fluid wall shear stress (wall shear stress) is also called frictional stress, and its effective measurement is the basis for accurately grasping frictional resistance; at the same time, as one of the basic flow dynamics parameters, its accurate measurement is for judging boundary layer separation, transition, etc. The flow state provides an important reference basis, which has important guiding significance for the design optimization of aircraft, engines, aircraft, etc., as well as drag and noise reduction. [0003] Microsensors provide an important means for the measurement of fluid wall shear stress. At present, there are two methods for measuring the shear stress of the fluid wall, the direct method and the indirect method. Since the p...

Claims

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Application Information

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IPC IPC(8): G01L9/12G06F17/50
CPCG01L9/12G06F30/17
Inventor 马炳和丁光辉杜希奇秦文君孙嘉伟邓进军徐晶晶刘国政
Owner NORTHWESTERN POLYTECHNICAL UNIV
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