Parameter Calibration Method of Ultrasonic Focusing Probe

Abstract

The invention provides a parameter calibration method for an ultrasonic focusing probe. With the method, concrete parameter values can be obtained, which is beneficial for realizing probe calibration and value analysis. The method comprise the following steps: upwardly moving the focusing probe in a Z direction with stepping distance being d and recording ultrasonic reflected signals s(z, t) at each position; subjecting s(z, t) to Fourier transformation so as to obtain a F[s(z,f)] curve and acquiring the center frequency of the probe; subjecting measured S(z, t) to two-dimensional Fourier transformation so as to obtain a set of data F[S(z,f)] and selecting data at a frequency f so as to obtain the experimental value V<Exp>(z) of the acoustic characteristic curve of a standard sample; and calculating the theoretical calculation value V<Cal>(z) of the acoustic characteristic curve of the standard sample and subjecting the experimental value V<Exp>(z) and the theoretical calculation value V<Cal>(z) of the acoustic characteristic curve of the standard sample to iterative fitting so as to obtain the parameters and aperture function of the focusing ultrasonic probe.

Description

technical field [0001] The invention relates to a detection method of an ultrasonic focusing probe, in particular to a parameter calibration method of the ultrasonic focusing probe. Background technique [0002] Ultrasonic microscope is a new type of non-destructive testing instrument. It uses high-frequency focused ultrasonic waves to perform non-destructive testing on objects. It can detect the internal and sub-surface structures of objects with high precision and high sensitivity. It can observe the depth from the surface to tens of millimeters. Micron to submicron scale structures that exist within. Ultrasonic microscope detection has the characteristics of high sensitivity, high resolution and intuitive image, and has been widely used in the fields of electronics industry, medicine, material science and so on. [0003] Ultrasonic microscopy generally uses water as a coupling agent, and uses a water-immersion focused ultrasonic probe for detection. A focused ultrasound...

AI Technical Summary

Problems solved by technology

However, there are few studies on ultrasonic microscopy, and there is also a lack of research on the calibration method of focusing probe parameters

At present, the calibration of the probe parameters generally uses measuring tools to directly measure the values. However, because direct measurement is a manual operation, it is greatly affected by human factors, and the accuracy of the measurement results is not high. It is difficult to meet the requirements of quantitative analysis and numerical simulation.

Chinese patent document CN101539542A provides a water immersion focusing probe performance testing device and its testing method, which can measure parameters such as the focal length, sound beam width, focus diameter, and sound beam deflection angle of the ultrasonic focusing probe, but this method cannot obtain focusing Parameters such as the radius of the probe wafer, the radian angle of the wafer, and the aperture function of the probe cannot be obtained to perform numerical analysis on the probe.

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