LED chip defect automatic detection equipment and method based on X rays
An LED chip and automatic detection technology, applied in the direction of material analysis using radiation, can solve the problems of poor repeatability and accuracy, time-consuming, manual adjustment, etc., to achieve positioning and detection, shorten scanning time, and improve accuracy Effect
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[0043] The present invention will be further described in detail below in conjunction with the accompanying drawings, so that those skilled in the art can implement it with reference to the description.
[0044] It should be understood that terms such as "having", "comprising" and "including" as used herein do not entail the presence or addition of one or more other elements or combinations thereof.
[0045] figure 1 It shows an implementation form according to the present invention, which has an X-ray detection body and a shielding shell arranged on the periphery of the X-ray detection body;
[0046] Wherein, the X-ray detection body has:
[0047] X-ray source 1, which generates X-rays to irradiate the chip to be inspected on the stage 6;
[0048] a detector 2, which detects X-rays passing through the chip to be inspected;
[0049] Chip holder 3, which is positioned on the stage in a detachable form, and the chip holder is provided with several chip grooves 31, and the chi...
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