An electrostatic accelerometer

Abstract

The invention provides a high-precision electrostatic accelerometer, which comprises a spring oscillator unit, a capacitor fixed pole plate, a bracket, a cavity, an electrical connector, a drive circuit, a capacitance displacement detection circuit, a feedback control circuit, an electrostatic feedback actuator circuit and a level adjustment base; the spring oscillator unit includes reeds, a test mass and a base; the reeds are mounted on both sides of the base to support the test mass in a way of symmetric stiffness; the test mass serves as a capacitor movable pole plate to form a differential capacitor with the capacitor fixed pole plate; the drive circuit, the capacitance displacement detection circuit, the feedback control circuit and the electrostatic feedback actuator circuit complete the detection of the differential capacitor and the feedback control of the accelerometer, and finally the test mass is pulled back to a balance position; and the level adjustment base is used for regulating the level of the cavity. The design of the stiffness symmetric distribution of the reeds enables the accelerometer to be high in stability, low in noise, high in precision and simple in structure, and the accelerometer has a wide range of applications in missions of high-precision measurement needs.

Description

technical field [0001] The invention relates to the fields of inertial sensing, microseismic measurement, resource detection, and geophysics, and more specifically, to a high-precision electrostatic accelerometer widely used in the above fields. Background technique [0002] An accelerometer is an instrument for measuring acceleration, which is of great significance in the fields of inertial sensing, microseismic measurement, resource detection, and geophysics. At present, high-precision accelerometers can be roughly divided into two categories according to the feedback method: one is the electromagnetic feedback accelerometer, and the other is the electrostatic feedback accelerometer. According to the processing method, it can be roughly divided into three categories: one is the accelerometer based on high-precision machining assembly, the other is the quartz accelerometer, and the other is the MEMS accelerometer. [0003] The representative of high-precision electromagnet...

AI Technical Summary

Problems solved by technology

However, the large mass and soft reed will lead to insufficient support of the reed, and a special design of the reed is required to meet the needs of supporting large inspection quality

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