Low-power consumption resonance-type electric field sensor

Abstract

The invention provides a low-power consumption resonance-type electric field sensor, which comprises a resonance tuning fork, a tuning fork vibration driving circuit and a sensing charge detection circuit, wherein one end of a vibration beam of the resonance tuning fork is provided with a driving electrode, and the other end is provided with a detection electrode; the side surface of the vibration beam is provided with an electric field sensing electrode; capacitors are formed between electric field sensing electrodes on different vibration beams; the tuning fork vibration driving circuit excites the resonance tuning fork vibration beam to vibrate, and the overlapped area among the different electric field sensing electrodes is caused to change periodically; and the sensing charge detection circuit is used for detecting voltage between the capacitors. The low-power consumption resonance-type electric field sensor can be used for detection on static, quasi-static and low-frequency electric fields, the size is small, the cost is low, and mass production is easy.

Description

technical field [0001] The invention relates to a low power consumption resonant electric field sensor, in particular to a low power consumption electric field sensor which adopts high Q value resonator vibration excitation. Background technique [0002] Electric field detection is of great significance to human production and life and scientific research. For different types of electric fields (electrostatic field, alternating electric field, transient electric field), the structure and principle of the sensor are different. [0003] The surface of the conductor placed in the electric field will induce charges. The conductor is used to prepare electrodes and a capacitor is placed between the electrodes. The electric field strength to be measured is proportional to the induced current or voltage generated by the induced charge on the electrode plate. This principle can be used to design low-frequency and high frequency electric field sensors. However, in an electrostatic f...

AI Technical Summary

Problems solved by technology

Although the application of MEMS technology has greatly reduced the power consumption of this type of sensor, the power consumption of the vibration generation part still cannot be ignored.

In recent years, optical electric field sensors based on the principles of crystal Pockels effect and Kerr effect have made some progress, but there are still many practical problems restricting their practical applications, such as multi-physics cross-coupling of crystals, material properties and stability of optical paths, etc. question

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