Silicon-based micro gas chromatography column with high separation efficiency and preparation method thereof

A technology for micro gas chromatography and separation efficiency, which is applied in the field of silicon-based micro-gas chromatography columns and their preparation, can solve the problem that the separation efficiency of silicon-based micro-gas chromatography columns is difficult to be further improved, achieves good thermal stability and mechanical strength, improves the The effect of separation efficiency
CN107561201BActive Publication Date: 2021-07-09SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Publication Date
2021-07-09

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention provides a silicon-based micro-gas chromatographic column with high separation efficiency and a preparation method thereof. The preparation method includes: 1) making a microchannel and a microfluidic port on a silicon substrate; 2) making a mask layer to protect The bonding surface on the silicon substrate; 3) constructing nanometer mesoporous silicon oxide in the micro-channel; 4) bonding a packaging cover plate to the bonding surface of the silicon substrate; 5) based on The components to be separated form corresponding modification materials on the surface of the nanometer mesoporous silicon oxide. Since nano-mesoporous silica has a large specific surface area and pore volume, and has good thermal stability and mechanical strength, the present invention constructs it in a silicon-based micro-gas chromatography column, which can greatly improve the separation of the chromatographic column. Efficiency: The surface of nanometer mesoporous silicon oxide has a high density of silanol (Si‑OH), which can further construct a monomolecular layer with different separation functions on the surface according to the different separation objects to achieve the desired separation effect.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to a silicon-based micro-gas chromatographic column with high separation efficiency and a preparation method thereof, which belongs to the field of micro-electromechanical systems, in particular to a silicon-based micro-gas chromatographic column with high separation efficiency based on mesoporous silicon oxide nanostructure technology. Micro gas chromatography column and preparation method thereof. Background technique

[0002] The main function of the gas chromatographic column is to separate the mixed sample gas to be analyzed, which is the core component of the gas chromatograph. Traditional gas chromatography columns include capillary columns, packed columns, etc. Due to their large volume, special column thermostats are needed to heat them, and their power consumption can reach several kilowatts. Therefore, in order to realize the miniaturization of gas chromatographs, the micro Transformation is crucial.

[0003] Since th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More