Surface friction-based several physical quantity detection device and detection method

Abstract

The invention relates to a surface friction-based several physical quantity detection device and detection method, and belongs to several physical quantity detection devices and detection methods. Thedevice comprises a high-frequency beam, a synchronous coupling beam, a low-frequency beam, a friction block, a supporting positioning structure, a piezoelectric exciting structure, a transverse piezoelectric large-displacement driving structure, a longitudinal piezoelectric large-displacement driving structure, an L-shaped supporting structure and the like, wherein the vibration pick-up structureof the low-frequency beam is used for picking up friction and vibration signals to detect the surface roughness and hardness; and a synchronized resonance structure is commonly formed by the low-frequency beam, the high-frequency beam and the synchronous coupling beam, and is used for detecting friction coefficients and multiplying output frequency to improve the sensitivity. The detection devicecan be used for detecting the kinetic friction coefficient, surface roughness and hardness by utilizing a relatively simple structure, and has a wide application prospect in the fields of surface detection and material identification.

Description

technical field [0001] The invention relates to a multi-physical quantity detection device and a detection method capable of realizing composite sensing of dynamic friction coefficient, surface roughness and hardness. Background technique [0002] At present, with the rapid development of intelligent precision machining technology, the surface quality and precision of processed parts are getting higher and higher. When inspecting and screening parts, it is very important to judge whether the surface mechanical performance parameters of the processed parts can meet the requirements of use. In terms of the detection of a single surface physical quantity, the existing theories and technologies at home and abroad can basically meet the requirements of use. Designing sensors capable of detecting surface multi-physical quantities is a key issue that scientists at home and abroad are concerned about. [0003] At present, relevant research institutions have explored and designed t...

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Problems solved by technology

However, the detection speed of AFM is slow, it is too affected by the probe, and it can only detect the surface with nanometer roughness, so it cannot be used as a routine detection method

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