Sputter coating machine and sputter coating method

Abstract

The invention provides a sputter coating machine and a sputter coating method. The sputtering coating machine of the present invention binds the mask on the carrying device in a binding manner, and sets a fastening and tensioning device around the mask, so that the purpose of fixing the mask from all sides can be achieved , can also achieve the purpose of tensioning and flattening, the tensioning and flattening effect of the mask sheet can reach the tensioning and flattening effect of the existing mask sheet tensioning machine, the tightening device and the mask sheet are all With a concave-convex structure, there will be no side slip when fixing the mask sheet. Since the mask sheet and the carrying device are detachably connected, the mask sheet can be disassembled at any time when maintenance or replacement is required. The diaphragm is easy to operate, does not need to reprocess the carrying device as the outer frame, can improve the replacement efficiency of the mask, and reduces the production cost of the sputter coating. The sputter coating method of the present invention utilizes the above-mentioned sputter coating machine for coating, and the coating quality is good and the coating cost is low.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a sputter coating machine and a sputter coating method. Background technique [0002] With the development of display technology, liquid crystal displays (Liquid Crystal Display, LCD) and other flat display devices are widely used in mobile phones, televisions, personal Various consumer electronic products such as digital assistants, digital cameras, notebook computers, and desktop computers have become the mainstream of display devices. [0003] Organic light-emitting diode (Organic Light-Emitting Diode, OLED) display, also known as organic electroluminescent display, is a new type of flat panel display device, due to its simple preparation process, low cost, low power consumption, high luminance, Wide range of working temperature, light and thin size, fast response speed, easy to realize color display and large-screen display, easy to realize matching with integrated circuit ...

AI Technical Summary

Problems solved by technology

[0006] During the use of the mask, it needs to be cleaned regularly to ensure the quality of the product. The coating of the sputtering coating is generally metal oxide, which is difficult to clean. After multiple cleanings, the mask needs to be torn off and replaced. For the new mask, since the current mask manufacturing process usually uses welding to fix the mask on the outer frame, it is necessary to rework the outer frame every time the mask is replaced, that is, the outer frame The welding position on the surface is polished to ensure the flatness of the outer frame and the reliability of re-welding with the mask sheet, and the grinding will cause the thickness of the outer frame to be thinned, so the outer frame must be scrapped after many times of reprocessing, because the outer frame The cost of reprocessing and scrapping is high, which leads to an increase in the cost of sputter coating

Images