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Micro sensor

A micro-sensor and sensor technology, applied in the field of micro-sensors, can solve the problems of decreased measurement accuracy, large volume, and increased power consumption, and achieve the effects of easy welding, low power, and small heat capacity

Inactive Publication Date: 2018-02-23
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, conventional sensors detect only one type of gas, so multiple sensors are required to detect multiple gases, resulting in large volume and increased power consumption.
[0006] In addition, since the sensing substance is placed outside the substrate, there is a problem that the measurement accuracy decreases due to moisture (humidity) in the air.

Method used

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Embodiment Construction

[0040] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings.

[0041] For reference, among the configurations of the present invention described below, the same configurations as those of the prior art are referred to the above-mentioned prior art, and will not be described in detail.

[0042] When it is stated that a certain part is "on" another part, it may be directly above the other part, or another part may exist between them. In contrast, when it is described that a certain part is "directly above" another part, the other part is not interposed therebetween.

[0043] The terminology used here is only used to describe specific embodiments and is not intended to limit the present invention. The singular form used herein also includes the plural form as long as there is no clear contrary meaning indicated in the text. The meaning of "comprising" used in the description is to specify specific characteristic...

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Abstract

Disclosed is a micro sensor. Particularly, a first sensor electrode is provided on a first side of a substrate, a second sensor electrode is provided on a second side of the substrate, and the substrate is provided with an etching hole penetrating from the first side to the second side of the substrate. A sensing material provided between the first sensor electrode and the second sensor electrodeis inserted in the etching hole. When detecting gas, the micro sensor can minimize influence of moisture in air.

Description

technical field [0001] The present invention relates to a microsensor, in particular to a first sensor electrode formed to one side of a substrate, a second sensor electrode formed to the other side of the substrate, and formed on the substrate from one side of the substrate microsensors through to etched holes on the other side of the substrate. Background technique [0002] Recently, with the increasing concern for the environment, it is necessary to develop a small sensor that can obtain various accurate information in a short time. In particular, miniaturization, high precision, and low cost of microarray sensors for gas sensors used to measure the concentration of relevant gases have been continuously pursued in order to improve the comfort of living space, cope with harmful industrial environments, and manage food and beverage production processes. Valuation. [0003] From the previous structure of ceramic sintering or thick film, the existing gas sensor has graduall...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/30
CPCG01N27/30G01N27/128G01N33/0016G01N33/0031G01N25/32G01N27/16
Inventor 安范模朴胜浩边圣铉
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