Heat conduction structure and heating and evaporating assembly

Abstract

The invention discloses a heat conduction structure. The heat conduction structure comprises a plurality of heat conduction pipes. Each heat conduction pipe is of a hollow tubular body with an opening. The outer walls of the multiple heat conduction pipes are mutually attached and fixed, and the shape of the section, in the radial direction, of the multiple attached heat conduction pipes is a gridshape. The invention further provides a heating and evaporating assembly. The heating and evaporating assembly comprises a crucible and the above heat conduction structure, and the shape and the sizeof the heat conduction structure are matched with the shape and the size of the crucible. The heat conduction structure is arranged in the crucible, and the outer walls of the heat conduction pipes on the outermost part of the heat conduction structure make contact with the inner wall of the crucible. According to the provided heat conduction structure and the provided heating and evaporating assembly, the heat conduction structure is formed by the multiple heat conduction pipes, a plurality of auxiliary evaporation bodies are formed, and disturbance among the auxiliary evaporation bodies canbe reduced; and the heat of the crucible wall adjacent to a heating source can be rapidly conducted into the crucible, and uniformity of the temperature field in the non-balance state is promoted.

Description

technical field [0001] The invention relates to the field of coating equipment, more specifically, to a heat conduction structure and a heating evaporation component. Background technique [0002] Evaporation coating is one of the technologies of vacuum PVD coating. Evaporation coating equipment is usually divided into vacuum chamber, vacuum acquisition system, thermal evaporation system, and electric control system. The thermal evaporation system consists of an evaporation container (evaporation crucible, evaporation boat, etc.), a resistance wire heater or other heating devices, a heat shielding system, and a heating temperature control system. The process puts the evaporation raw material in the crucible, and uses the heating mode in the vacuum environment to cause the solid-liquid-gas phase transition process of the coating raw material. The evaporation raw material is heated above the melting point to generate evaporation gas at the liquid surface or directly evaporate...

AI Technical Summary

Problems solved by technology

This splashing phenomenon is more serious in liquid evaporation process with poor thermal conductivity, large evaporation process and relatively large evaporation crucible structure

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