A Resonant Sensing Piezoelectric Stack Sensing Actuator
A piezoelectric stack and actuator technology, which is applied to the measurement of the property force of piezoelectric devices, piezoelectric effect/electrostrictive or magnetostrictive motors, instruments, etc., and can solve the problems of reducing the performance of actuators , to achieve the effect of improving stability and anti-interference ability, reducing size and strong anti-interference ability
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Embodiment 1
[0029] Embodiment 1 proposes a piezoelectric stack sensing actuator with resonant sensing, such as figure 1 As shown, the sensor actuator includes a package cavity 1, a fixed sleeve 2, a piezoelectric stack 3, a transmission mechanism 4, a sensor 5, a thrust rod 6, a pretension spring 7 and an end cover 8; the fixed sleeve The cylinder 2 , the piezoelectric stack 3 , the conduction mechanism 4 , the sensor 5 , the thrust rod 6 , and the pretension spring 7 are all encapsulated inside the encapsulation cavity 1 through the end cap 8 .
[0030] A resonant sensor piezoelectric stack sensor actuator proposed in this embodiment combines the sensor and actuator together, and highly integrates the simple structure-integrated sensor actuator, in the same sensor actuator Combine the two types of structural integration and functional integration, so that it has a structurally integrated structure, and at the same time integrates sensors and actuators, making it functionally integrated, ...
Embodiment 2
[0032] This embodiment is a further limitation of the resonant sensing piezoelectric stack sensing actuator described in Embodiment 1, such as figure 1 As shown, the fixing sleeve 2 is arranged at the bottom of the packaging cavity 1; one end of the piezoelectric stack 3 is fixed in the hole of the fixing sleeve 2, and the other end is fixed in the In the slot hole of the bottom surface of the transmission mechanism 4; the sensor 5 is arranged inside the transmission mechanism 4; the upper bottom surface of the transmission mechanism 4 is equipped with a thrust rod 6; the end cover 8 is provided with an opening; The thrust rod 6 passes through the opening of the end cover 8 to receive external force.
[0033]Quartz specifically has force-frequency characteristics. When the quartz resonator is subjected to stress, the resonant frequency will change accordingly and have a linear relationship with the applied stress, and the frequency stability of the quartz crystal is excellent ...
Embodiment 3
[0036] This embodiment is a further definition of the resonant sensing piezoelectric stack sensor actuator described in Embodiment 1. The lower bottom surface of the closed cavity 1 is a closed bottom surface; the upper surface of the closed cavity 1 The opening of the bottom surface further forms a cavity structure, and an internal thread is provided on the inner wall of the cavity close to the upper bottom surface; two lead holes are provided on the cavity of the closed cavity 1; the lead holes are used to connect the inside of the cavity Existing signal lines are guided outside the cavity.
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