A processing device for micro-nano hole array

Abstract

The invention discloses a micro-nanometer hole array machining device. The micro-nanometer hole array machining device comprises a support frame, a laser device, a vacuum reaction device, a magnetic field device and a console; the vacuum reaction device comprises a reaction device, an absorbing mechanism, a vacuum air guide pipe and a vacuum pump; the reaction device comprises an upper cover, a reaction box and a chassis; the reaction box is mounted rightly below the laser device, and the side wall thereof is connected with the vacuum pump through the vacuum air guide pipe; the chassis is mounted at the bottom of the reaction box, and is provided with an annular groove in the surface and a through hole in the bottom; the absorbing mechanism comprises an absorbing chassis and a pressure adjuster; the absorbing chassis is mounted at the bottom of the chassis, and the top thereof communicates with the through hole; and one end of the pressure adjuster is connected to the absorbing chassis, and the other end is connected with the vacuum pump. The micro-nanometer hole array machining device can realize a mode of adopting micro-nanometer composite structure metal particles for micro-nanometer machining through optimal structure design, improves the machining stability, and improves the machining quality controllability.

Description

technical field [0001] The invention relates to the technical field of material processing, in particular to a processing device of a micro-nano hole array. Background technique [0002] Micro-nanopore arrays widely exist in microfluidic chips, biochips and microelectronic devices. With the continuous improvement of micro-nano processing technology, micro-nano structures with smaller processing structure size and higher precision requirements can be realized. For example, solid-state nanopores used for DNA single-molecule analysis are one of the typical cases. Compared with biological nanopores commonly used in DNA single-molecule analysis, solid-state nanopores have obvious advantages in chemical, thermal, mechanical stability, etc. large-scale processing, and precise control of its aperture. Therefore, many research groups continue to pay attention to the processing of solid-state nanopores and study the movement of biomolecules in solid-state nanopores. [0003] The c...

AI Technical Summary

Problems solved by technology

However, in order to achieve micro-nano processing of metal particles with micro-nano composite structures wrapped in gold, silver or aluminum, there is still no complete set of etching equipment that can realize this function, so it is urgent to further improve the existing processing. Improvement and optimization of processing equipment for micro-nanohole arrays

Images