A kind of processing method of nanometer and micrometer hole

A processing method, nanotechnology, applied in the direction of nanotechnology, technology for producing decorative surface effects, microstructure technology, etc., to achieve the effect of controllable shape and depth, environmentally friendly operation, and great application value

Active Publication Date: 2018-11-06
GUANGDONG UNIV OF TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Correspondingly, the diameter of the nanopores formed by the processing is also strictly limited to 10nm-100nm
In addition, since the gold nanoparticles are affected by the evaporation of the substrate during processing, their trajectory has a certain degree of randomness. Therefore, how to control the trajectory of the gold nanoparticles during processing and then process the pores with controllable shapes is extremely challenging.

Method used

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  • A kind of processing method of nanometer and micrometer hole
  • A kind of processing method of nanometer and micrometer hole
  • A kind of processing method of nanometer and micrometer hole

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Step 1: Clean the substrate 101 with deionized water, and remove the surface dirt with a plasma cleaner; the substrate 101 is a plate-shaped material of polyethylene terephthalate (PET);

[0036] Step 2: If figure 1As shown, the photoresist 102 is spin-coated on the substrate 101, exposed and developed to form a specific substrate 103 printed with a target pattern;

[0037] Step 3: Deposit micro-nano composite structure metal particles 106 on the substrate surface, that is, control the area of ​​the micro-nano composite structure metal particles 106 deposited on the substrate surface according to the exposed pattern, and then control the shape of the nanopore or micropore (such as a circle shape, square, etc.) and aperture; the micro-nano composite metal particle 106 is centered on the magnetic core, and the surface of the magnetic core is coated with a nano-metal particle coating composed of a plurality of nano-gold, silver or aluminum particles; the magnetic The inne...

Embodiment 2

[0042] Step 1: Clean the substrate 101 with deionized water, and remove the surface dirt with a plasma cleaner; the substrate 101 is a glass plate material;

[0043] Step 2: Spin-coat the photoresist 102 on the substrate 101, expose and develop, and form a specific substrate 103 printed with target patterns;

[0044] Step 3: Deposit micro-nano composite structure metal particles 106 on the substrate surface, that is, control the area of ​​the micro-nano composite structure metal particles 106 deposited on the substrate surface according to the exposed pattern, and then control the shape of the nanopore or micropore (such as a circle shape, square, etc.) and aperture; the micro-nano composite metal particle 106 is centered on the magnetic core, and the surface of the magnetic core is coated with a nano-metal particle coating composed of a plurality of nano-gold, silver or aluminum particles; the magnetic The inner core is any one of spherical iron particles, iron compound parti...

Embodiment 3

[0049] Step 1: Clean the substrate 101 with deionized water, and remove the surface dirt with a plasma cleaner; the substrate 101 is a glass plate material;

[0050] Step 2: Spin-coat the photoresist 102 on the substrate 101, expose and develop, and form a specific substrate 103 printed with target patterns;

[0051] Step 3: Deposit micro-nano composite structure metal particles 106 on the substrate surface, that is, control the area of ​​the micro-nano composite structure metal particles 106 deposited on the substrate surface according to the exposed pattern, and then control the shape of the nanopore or micropore (such as a circle shape, square, etc.) and aperture; the micro-nano composite metal particle 106 is centered on the magnetic core, and the surface of the magnetic core is coated with a nano-metal particle coating composed of a plurality of nano-gold, silver or aluminum particles; the magnetic The inner core is any one of spherical iron particles, iron compound parti...

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Abstract

A method for processing nano and micro holes, comprising the following steps: 1. Cleaning a base material and removing dirt on its surface; 2. Spin-coating photoresist, exposing and developing to form a substrate; 3. Depositing micro-nano holes on the surface of the substrate. Composite structure metal particles; the micro-nano composite structure metal particles are centered on the magnetic core, and the surface is coated with nano-metal particle coatings composed of multiple nano-gold, silver or aluminum particles; 4. Remove the photoresist and only retain the micro-nano composite structure Metal particle dot array; 5. Use laser to irradiate the substrate, and apply a uniform strong magnetic field at the same time to process and form processing holes; 6. After reaching the target aperture size, shape, and depth of nano-holes or micro-holes, stop laser irradiation and remove the uniform strong magnetic field , to obtain finished products; the processing method proposed by the present invention can process blind holes or through holes of any shape with a diameter above 100nm and a micron level, which is environmentally friendly and easy to operate, and the processed aperture size, shape and depth can all achieve controllable effects .

Description

technical field [0001] The invention relates to the technical field of material processing, in particular to a processing method for nanometer and micrometer holes. Background technique [0002] With the continuous improvement of micro-nano processing technology, the micro-nano structure with smaller structure size and higher precision requirements can be realized. For example, solid-state nanopores for single-molecule analysis of DNA are one of the typical cases. Compared with biological nanopores commonly used in DNA single-molecule analysis, solid-state nanopores have obvious advantages in chemical, thermal, and mechanical stability, and can be fabricated by conventional micro-nano processing techniques, so that nanopores can be realized large-scale processing, and can precisely control its pore size. Therefore, many research groups continue to focus on the processing of solid-state nanopores and study the movement of biomolecules in solid-state nanopores. [0003] The...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00B82Y40/00
CPCB81C1/00349B81C1/00412B81C1/00849B82Y40/00H01L21/30604B81C1/00087B81C2201/0188B81C1/00373H01L29/0665
Inventor 陈新施达创陈云高健汪正平杨海东
Owner GUANGDONG UNIV OF TECH
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