Quantitative detection device and detection method for chromatic aberration of high magnification objective lens

Abstract

The invention discloses a quantitative detection device and a detection method for the color difference of a high power objective. The device comprises an RGB three-color light source, a lifting adjustment object stage, a target and an observation cylinder which are arranged sequentially, wherein the target is arranged on the lifting adjustment object stage; one end, far away from the target, of the observation cylinder is provided with a camera; one end, close to the target, of the observation cylinder is provided with an objective mounting structure; the observation cylinder is internally provided with an observation mirror capable of axially moving along the observation cylinder; the side surface of the observation cylinder is provided with an observation mirror moving device connectedwith the observation mirror; the observation mirror moving device is provided with a moving distance measurement part; and when the observation mirror is located at a zero position, the camera is located on the focal plane of the observation mirror. The measurement stroke is expanded through an object image conversion mode, the difference between focuses among different color light can be acquired, that is, the color difference is acquired; the measurement indexing requirements are reduced; and the cost is low, and the measurement precision is high.

Description

Technical field [0001] The invention relates to a method for detecting chromatic aberration of an objective lens, in particular to a quantitative detection device and method for detecting chromatic aberration of a high-power objective lens. Background technique [0002] As a kind of achromatic system, microscope objectives are classified according to the size of chromatic aberration. There are three types: achromatic objectives, semi-apochromatic objectives, and apochromatic objectives. The current way to determine the chromatic aberration of the objective lens is mainly based on the human eye. The chromatic aberration of the objective lens is qualitatively determined by visual imaging. [0003] According to the definition of the ISO 19012-2 standard "Microscope-Microscope Objective 2 Chromatic Aberration", the type of chromatic aberration of the objective lens is determined as follows: [0004] (1) Achromatic: the absolute value of the red and blue focus distance is less than 2 ti...

AI Technical Summary

Problems solved by technology

The focal depth of the high-magnification objective lens is 0.2u. Considering the measurement range of 0.2u, it is necessary to use a nanometer platform for high-precision measurement. However, the nanometer platform is expensive and has high requirements for the operating environment, including shockproof. This measurement is very important for error control. The requirements are very high, and it is easy to affect the judgment result

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