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Coupling piezoresistive MEMS oscillator based on high-order synchronization

An oscillator, high-level technology, applied in the field of coupled piezoresistive MEMS oscillators, can solve the problems of difficulty in implementation and large differences in the natural frequency of resonators, and achieve the effect of overcoming frequency errors

Active Publication Date: 2018-05-01
XI AN JIAOTONG UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, due to the large difference in the natural frequency of the resonator caused by the error of micromachining and the small frequency locking bandwidth in the synchronization phenomenon, the synchronization phenomenon in the MEMS oscillator is difficult to achieve

Method used

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  • Coupling piezoresistive MEMS oscillator based on high-order synchronization
  • Coupling piezoresistive MEMS oscillator based on high-order synchronization
  • Coupling piezoresistive MEMS oscillator based on high-order synchronization

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Embodiment Construction

[0021] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0022] Such as figure 1 As shown, a coupled piezoresistive MEMS oscillator based on high-order synchronization includes two first double-end fixed support tuning fork beam 4-1 and a second double-end fixed support tuning fork beam 4-2 arranged side by side, the first The length of the double-ended fixed support tuning fork beam 4-1 is 550 microns, the length of the second double-ended fixed support tuning fork beam 4-2 is 292 microns, and the left and right ends of the first double-ended fixed support tuning fork beam 4-1 are respectively connected to the lining The first electrode 1-1 and the second electrode 3-1 consolidated by the bottom insulating layer are fixed, so that the first double-end fixed-supported tuning fork beam 4-1 is suspended on the hollow substrate; the second double-ended fixed-supported tuning fork beam 4-1 The left and right ends of 4...

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Abstract

The invention discloses a coupling piezoresistive MEMS oscillator based on high-order synchronization, and the oscillator comprises two parallel double-end-fixed tuning fork beams. The left and rightends of each double-end-fixed tuning fork beam are fixed with two electrodes which are fixedly connected with a substrate insulating layer, thereby enabling the double-end-fixed tuning fork beams to be suspended in a hollow-out substrate. A capacitor electrode plate extending at an outer side of the central part of each double-end-fixed tuning fork beam cooperates with one capacitor electrode plate, and the vibration in the bending direction of the double-end-fixed tuning fork beams is excited through the action of a static force. The parallel electrode plates extending from the inner sides ofthe two double-end-fixed tuning fork beams interact with each other through the static force, and the amplitude of the coupling effect is adjusted through the control of the central electromotive force of the two double-end-fixed tuning fork beams. According to the invention, the oscillator achieves the synchronization, improves the scale factor and sensitivity through the frequency multiple proportion locking relation in the high-order synchronization when the oscillator serves as a sensor, and improves the detection precision.

Description

technical field [0001] The invention relates to the technical field of MEMS oscillators, in particular to a coupled piezoresistive MEMS oscillator based on high-order synchronization. Background technique [0002] Mechanical oscillators are widely used in electronic systems that require clock references and sensors such as mass and force for resonant detection. At present, MEMS oscillators are easy to integrate in electronic devices, and their tiny geometric dimensions, extremely small energy consumption, semiconductor The advantages of the process, such as easy mass production and low cost, are considered to have the potential to replace quartz oscillators in the field of clock references, and have revolutionary advantages in the field of sensing and detection. However, due to the scale effect brought about by the extremely small geometric size of MEMS oscillators, they are easily excited to nonlinearity which reduces their dynamic range, brings large-amplitude instability ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02
CPCH03H9/02244H03H9/02338H03H2009/02283H03H2009/02385
Inventor 韦学勇浦东徐柳宦荣华蒋庄德
Owner XI AN JIAOTONG UNIV
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