Low resistance and leakage device
A device and electro-coupler technology, applied in the field of low-resistance and low-leakage semiconductor devices
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[0030] Many well-known manufacturing steps, components, and connectors have been omitted or have not been described in detail in order not to obscure the disclosure.
[0031]Gallium Nitride (GaN) based high electron mobility transistors suffer from dynamic on-resistance (R on ) or current collapse, where the current collapse is mainly attributed to (contributed to) surface trapping and bulk (epi buffer) trapping. Surface trapping is usually minimized by some dielectric passivation scheme, while bulk trapping is associated with leakage paths in the GaN epitaxial layer (epi). The conductivity and leakage paths of the epitaxial layer can alter the bulk trapping such that increasing the leakage path in the epitaxial layer results in reduced trapping, ie low current collapse. The inventive concept proposes to selectively switch the conductivity of the epitaxial layer by ion implantation and provide leakage paths through metal-filled trenches in order to realize low current collaps...
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