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Multi-degree of freedom piezoelectric stick-slip micronano positioning platform and driving method thereof

A technology of micro-nano positioning and degree of freedom, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve complex control, small motion stroke, low positioning accuracy, etc. problem, to achieve the effect of improving output performance, reducing frictional resistance, and convenient control

Active Publication Date: 2018-05-29
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the technical problems of the existing multi-degree-of-freedom motion platforms such as small motion stroke, low positioning accuracy, and complicated control, the present invention discloses a multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning and its driving method, which has a large stroke, Advantages of high precision and easy control

Method used

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  • Multi-degree of freedom piezoelectric stick-slip micronano positioning platform and driving method thereof
  • Multi-degree of freedom piezoelectric stick-slip micronano positioning platform and driving method thereof
  • Multi-degree of freedom piezoelectric stick-slip micronano positioning platform and driving method thereof

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specific Embodiment approach 1

[0045] Specific implementation mode one: combine Figure 1~Figure 15 This embodiment mode is described, and this embodiment mode provides a specific implementation scheme of a multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform. The multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform and its driving method are composed of an x-direction driving component 1, a y-direction driving component 2, and a θ z The rotation assembly 3, the upper shell 4 and the connecting screw 3 5 are composed; the y-direction driving assembly 2 is fixed on the x-direction driving assembly 1 through the connecting screw 1-2-5 and the connection hole 1-2-5 screw connection, θ z The rotation assembly 3 is fixed on the y-direction drive assembly 2 through the threaded connection of the connection screw 2 3-5 and the connection hole 2 2-2-3, and the connection screw 3 5 passes through the countersunk hole 4-1 and the connection hole 3 3 -1-3 screw ...

specific Embodiment approach 2

[0051] Specific implementation mode two: combination Figure 16~Figure 17 This embodiment will be described. This embodiment provides a multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform that implements a stator assembly with a chute structure. Its structural composition and connection method are the same as those in the first embodiment, except that the specific structure of the displacement conversion mechanism 1-3-1 in the stator assembly 1-3 is different.

[0052] The displacement conversion mechanism 1-3-1 is a chute frame structure, which is made of aluminum alloy 7075. The displacement conversion mechanism 1-3-1 is also provided with a driving foot 1-3-1-1 and a thickened beam 1 -3-1-2, chute 1-3-1-3, straight circular hinge Ⅰ1-3-1-4, rigid straight beam Ⅰ1-3-1-5, straight circular hinge Ⅱ1-3-1- 6. Straight round hinge III 1-3-1-7, rigid straight beam II 1-3-1-8, straight round hinge IV 1-3-1-9; the rigid straight beam I 1-3-1-5 two Ther...

specific Embodiment approach 3

[0053] Specific implementation mode three: combination Figure 18~Figure 19 This embodiment will be described. This embodiment provides a multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform that realizes a stator assembly with an asymmetric structure. Its structural composition and connection method are the same as those in the first embodiment, except that the specific structure of the displacement conversion mechanism 1-3-1 in the stator assembly 1-3 is different.

[0054] The displacement conversion mechanism 1-3-1 is an asymmetrical frame structure, which is made of aluminum alloy 7075. The displacement conversion mechanism 1-3-1 is provided with a stator installation hole 1-3-1-10, and through the stator installation hole 1-3-1-10 The displacement conversion mechanism 1-3-1 can be fixed on the base 1-1, and the displacement conversion mechanism 1-3-1 is provided with a straight circular hinge I 1-3-1-4, Rigid straight beam Ⅲ 1-3-1-13, straig...

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Abstract

The invention discloses a multi-degree of freedom piezoelectric stick-slip micronano positioning platform and a driving method thereof. By the multi-degree of freedom piezoelectric stick-slip micronano positioning platform, the technical problems of small moving range, low accuracy, control complexity and the like of an existing multi-degree of freedom moving platform are solved. The multi-degreeof freedom piezoelectric stick-slip micronano positioning platform comprises an x-direction driving assembly, a y-direction driving assembly, a Theta z rotation assembly, an upper shell and a connection screw. A displacement conversion mechanism generates an oblique force by telescopic deformation of a piezoelectric stack, and a rotor is further driven to move; when the piezoelectric stack stretches, the friction driving force between the rotor and a stator can be increased; and when the piezoelectric stack contracts, the friction resistance between the rotor and the stator can be reduced. Themulti-degree of freedom piezoelectric stick-slip micronano positioning platform has the advantages of large range and high accuracy, is simple and convenient to control and has wide application prospect in the high-end technical field of spatial mechanisms, life sciences, optical precise instrument and superfinishing.

Description

technical field [0001] The invention relates to a multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform and a driving method thereof, belonging to the technical field of piezoelectric precision driving. Background technique [0002] With the rapid development of science and technology, traditional drive devices can no longer meet the high-precision drive and positioning requirements, and drives with new functional materials and physical property effects have been developed rapidly. Among them, the piezoelectric actuator is based on the inverse piezoelectric effect of the piezoelectric element, that is, when the piezoelectric element is subjected to an electric signal, it will deform to achieve a small displacement. It has many advantages such as high precision, fast response, low heat generation, and no electromagnetic interference. [0003] Drive technology is the key to the development of the motion platform, which directly determines the speed, ...

Claims

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Application Information

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IPC IPC(8): H02N2/00
CPCH02N2/005
Inventor 程廷海高琪卢晓晖王英廷李义康张晓松
Owner CHANGCHUN UNIV OF TECH
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