Multi-degree of freedom piezoelectric stick-slip micronano positioning platform and driving method thereof

A technology of micro-nano positioning and degree of freedom, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve complex control, small motion stroke, low positioning accuracy, etc. problem, to achieve the effect of improving output performance, reducing frictional resistance, and convenient control

Active Publication Date: 2018-05-29
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the technical problems of the existing multi-degree-of-freedom motion platforms such as small motion stroke, low positioning accuracy, and complicated control, the pres

Method used

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  • Multi-degree of freedom piezoelectric stick-slip micronano positioning platform and driving method thereof
  • Multi-degree of freedom piezoelectric stick-slip micronano positioning platform and driving method thereof
  • Multi-degree of freedom piezoelectric stick-slip micronano positioning platform and driving method thereof

Examples

Experimental program
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Example Embodiment

[0045] Embodiment 1: Combining Figure 1~Figure 15 This embodiment is described, which provides a specific embodiment of a multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform. The multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform and its driving method are composed of x-direction drive assembly 1, y-direction drive assembly 2, θ z The rotating assembly 3, the upper shell 4 and the connecting screw three 5 are composed; the y-direction drive assembly 2 is fixed on the x-direction drive assembly 1 through the threaded connection of the connecting screw one 2-5 and the connecting hole one 1-2-5, and θ z The rotating assembly 3 is threadedly connected to the y-direction drive assembly 2 through the connecting screw two 3-5 and the connecting hole two 2-2-3, and the connecting screw three 5 passes through the countersunk head hole four 4-1 and the connecting hole three 3 -1-3 threaded connection so that the upper shell 4 ...

Example Embodiment

[0051] Specific implementation mode 2: Combining Figure 16~Figure 17 This embodiment will be described. This embodiment provides a multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform that implements a stator assembly with a chute structure. Its structural composition and connection mode are the same as those of the first embodiment, the difference is that the specific structure of the displacement conversion mechanism 1-3-1 in the stator assembly 1-3 is different.

[0052] The displacement conversion mechanism 1-3-1 is a chute frame structure, made of aluminum alloy 7075 material, and the displacement conversion mechanism 1-3-1 is also provided with a driving foot 1-3-1-1, a thickened beam 1 -3-1-2, inclined groove 1-3-1-3, straight circular hinge I1-3-1-4, rigid straight beam I1-3-1-5, straight circular hinge II1-3-1- 6. Straight circular hinge Ⅲ 1-3-1-7, rigid straight beam Ⅱ 1-3-1-8, straight circular hinge Ⅳ 1-3-1-9; the rigid straight beam ...

Example Embodiment

[0053] Specific implementation three: combination Figure 18~Figure 19 This embodiment will be described. This embodiment provides a multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform that implements a stator assembly with an asymmetric structure. Its structural composition and connection mode are the same as those of the first embodiment, the difference is that the specific structure of the displacement conversion mechanism 1-3-1 in the stator assembly 1-3 is different.

[0054] The displacement conversion mechanism 1-3-1 is an asymmetric frame-shaped structure, using aluminum alloy 7075 material, and the displacement conversion mechanism 1-3-1 is provided with a stator mounting hole 1-3-1-10, which passes through the stator mounting hole. 1-3-1-10 The displacement conversion mechanism 1-3-1 can be fixed on the base 1-1, and the displacement conversion mechanism 1-3-1 is provided with a straight circular hinge I 1-3-1-4, Rigid straight beam III...

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Abstract

The invention discloses a multi-degree of freedom piezoelectric stick-slip micronano positioning platform and a driving method thereof. By the multi-degree of freedom piezoelectric stick-slip micronano positioning platform, the technical problems of small moving range, low accuracy, control complexity and the like of an existing multi-degree of freedom moving platform are solved. The multi-degreeof freedom piezoelectric stick-slip micronano positioning platform comprises an x-direction driving assembly, a y-direction driving assembly, a Theta z rotation assembly, an upper shell and a connection screw. A displacement conversion mechanism generates an oblique force by telescopic deformation of a piezoelectric stack, and a rotor is further driven to move; when the piezoelectric stack stretches, the friction driving force between the rotor and a stator can be increased; and when the piezoelectric stack contracts, the friction resistance between the rotor and the stator can be reduced. Themulti-degree of freedom piezoelectric stick-slip micronano positioning platform has the advantages of large range and high accuracy, is simple and convenient to control and has wide application prospect in the high-end technical field of spatial mechanisms, life sciences, optical precise instrument and superfinishing.

Description

technical field [0001] The invention relates to a multi-degree-of-freedom piezoelectric stick-slip micro-nano positioning platform and a driving method thereof, belonging to the technical field of piezoelectric precision driving. Background technique [0002] With the rapid development of science and technology, traditional drive devices can no longer meet the high-precision drive and positioning requirements, and drives with new functional materials and physical property effects have been developed rapidly. Among them, the piezoelectric actuator is based on the inverse piezoelectric effect of the piezoelectric element, that is, when the piezoelectric element is subjected to an electric signal, it will deform to achieve a small displacement. It has many advantages such as high precision, fast response, low heat generation, and no electromagnetic interference. [0003] Drive technology is the key to the development of the motion platform, which directly determines the speed, ...

Claims

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Application Information

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IPC IPC(8): H02N2/00
CPCH02N2/005
Inventor 程廷海高琪卢晓晖王英廷李义康张晓松
Owner CHANGCHUN UNIV OF TECH
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