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Device and method for detecting position state of wafer in chip box based on PLC control

A technology of state detection device and wafer box, which is applied in the direction of program control, program control, electrical program control, etc. Process stable and reliable effect

Inactive Publication Date: 2018-06-01
SHENYANG KINGSEMI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the existing wafer position state detection device takes a long time to scan, the laser sensor does not move, the cassette moves up and down to scan, and the detection method is complicated

Method used

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  • Device and method for detecting position state of wafer in chip box based on PLC control
  • Device and method for detecting position state of wafer in chip box based on PLC control
  • Device and method for detecting position state of wafer in chip box based on PLC control

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Embodiment Construction

[0035] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0036] Such as figure 1 Shown is the control structure diagram of the present invention.

[0037] A PLC controller executes the program and detects various sensors of the cassette and the wafer. The pulse output interface of the PLC is connected to the servo driver; the encoder pulse output interface of the servo motor is connected to the PLC through the level conversion module.

[0038] The PLC communicates with the upper computer; the detection sensor includes: a laser sensor, a cassette detection sensor, a wafer slip-out sensor, a zero position sensor, a positive limit sensor, and a negative limit sensor. The laser sensor is used to detect the position of the wafer; the cassette detection sensor is used to detect the presence or absence of the cassette; the wafer slide out sensor is used to detect whether the wafer has slipped out of the c...

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PUM

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Abstract

The invention relates to a device for detecting the position state of a wafer in a chip box based on PLC control. A principal computer is connected with a PLC, and sends a control command to the PLC and receives feedback information of the PLC. The PLC is connected with the input end of a servo motor through a servo driver, and sends a pulse output control signal to the servo motor to control theservo motor. The output end of the servo motor is connected with the PLC through a pulse encoder, and the servo motor sends feedback information to the PLC through the pulse encoder. The servo motor is connected with a laser sensor through a screw rod, and controls the motion of the laser sensor. The laser sensor is connected with the PLC, and detects the position information of a wafer. In the scanning process, the chip box is not moving, the laser sensor does reciprocating motion once, and thus, the position state of the wafer in the chip box can be calculated. The detection method is simple, and the detection process is stable and reliable.

Description

technical field [0001] The invention relates to the field of semiconductor equipment control, in particular to a device and method for detecting the position and state of a wafer in a wafer box based on PLC control. Background technique [0002] Cassettes are carriers for wafers in semiconductor equipment. In fully automatic semiconductor equipment, several wafers are placed in a cassette, and the cassette is placed on a carrier. The wafer scanning sensor is fixed on the vertical lifting platform driven by the ball screw controlled by the servo motor. Under the control of the scanning control device, the number of wafers in the cassette and the status of wafer positions are obtained. The position status of the wafer in the cassette is the prerequisite for the semiconductor equipment to carry out the next process. [0003] However, the existing wafer position state detection device takes a long time to scan, the laser sensor does not move, the cassette moves up and down fo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/05
CPCG05B19/058G05B2219/14039
Inventor 邹春太张军郭生华符平平
Owner SHENYANG KINGSEMI CO LTD
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