Novel Halbach secondary structure permanent magnet synchronous linear motor

Abstract

The invention discloses a novel Halbach secondary structure permanent magnet synchronous linear motor. The primary structure of the motor is a three-phase hollow winding; the secondary structure of the motor is a novel Halbach permanent magnet array of a bilateral structure. The new Halbach permanent magnet array is equivalent to the superposition of two traditional Halbach permanent magnet arrays. Analytical analysis is performed on the magnetic field of the motor through using magnetic vector potentials and boundary conditions, so that the expression of the air gap magnetic field is obtained; the analysis result is verified through using finite element simulation; on the basis of the analysis, a prototype is designed and manufactured; the prototype is tested; the static thrust and no-load counter electromotive force waveforms of the prototype are measured; and by means of contrast experimental results and simulation results, the rationality of the analysis and the superiority of thenovel Halbach array are verified. The motor is of great reference value for the research of permanent magnet synchronous linear motors.

Description

technical field [0001] The invention belongs to the field of motor design, in particular to a novel Halbach secondary structure permanent magnet synchronous linear motor. Background technique [0002] In recent years, my country has developed rapidly in the field of integrated circuit (IC) manufacturing, but there are still problems such as small production scale and backward technology, and it lacks competitiveness compared with foreign products. In order to promote the development of my country's IC manufacturing industry, the state has included "ultra-large-scale integrated circuit manufacturing equipment and complete sets of technology" in the major national science and technology projects during the "Eleventh Five-Year Plan" period. It is expected that the scale of my country's integrated circuit industry will double. In the process of integrated circuit manufacturing and processing, the ultra-precise two-dimensional positioning device plays an important role, so the re...

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Problems solved by technology

Due to a series of problems such as friction, backlash, and deformation in the linear conversion mechanism in the device, it is difficult to achieve a high level of accuracy for this positioning device

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