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Device and method for correction of infrared thermometer

A technology of infrared thermometers and calibration devices, which is applied to measuring devices, radiation pyrometry, instruments, etc., can solve problems such as the large deviation between the measured temperature and the actual temperature, and achieve the goal of ensuring accuracy, precision, and precise measurement Effect

Active Publication Date: 2018-06-08
江苏鑫华半导体科技股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Purpose of the invention: In order to solve the problem that there is a large deviation between the measured temperature and the actual temperature of the existing thermometers used to measure the production temperature of molten silicon in the area, the present invention provides a calibration device for infrared thermometers, and the present invention further provides Calibration method of infrared thermometer

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  • Device and method for correction of infrared thermometer
  • Device and method for correction of infrared thermometer
  • Device and method for correction of infrared thermometer

Examples

Experimental program
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Effect test

Embodiment 1

[0025] A sight glass for temperature correction of infrared thermometers, see figure 1 , comprising a double-layer mirror glass 101 and a cooling water interlayer 102 arranged between the double-layer mirror glass 101 . The sight mirror is fastened by means of flange connection; the sight mirror also includes a cooling water inlet 103 and a cooling water outlet 104 .

[0026] A calibration device for an infrared thermometer, see image 3 , including a black body furnace 2, a sight glass 1 and an infrared temperature measuring device 3 arranged in sequence non-contact, the black body furnace is provided with a radiator 201, and the sight mirror 1 includes a double-layer mirror glass 101 and a double-layer sight Cooling water interlayer 102 between mirror glass 101 (see figure 1 ), the infrared temperature measuring device 3 includes an infrared thermometer 301; the infrared rays emitted by the radiator 201 are gathered on the infrared thermometer 301 through the viewing mirro...

Embodiment 2

[0032]The flow rate of cooling water will affect the temperature distribution of cooling water in the sight glass. When the flow rate of cooling water is 1L / min, the actual operating condition of the reduction furnace is used as the boundary condition, and the temperature distribution of the water in the sight glass is calculated by the fluid mechanics simulation software. According to the simulation results, there is an obvious temperature gradient distribution in the mirror cooling water, see Figure 4 , If the cooling water flow rate is too small, it will cause temperature measurement errors due to the large cooling water temperature gradient, and the reasonable cooling water flow rate should be 5-10L / min.

[0033] Because the cooling water has an absorption effect on infrared rays, that is, part of the energy emitted by the silicon rod is absorbed by the cooling water after passing through the mirror, resulting in the measured temperature of the infrared thermometer being l...

Embodiment 3

[0039] According to the state of the actual operation of the reduction furnace, make such image 3 The correcting device needs to adjust the position of the infrared thermometer 301 when performing the temperature calibration of the infrared thermometer, and fix the position of the infrared thermometer 301 when the display temperature of the infrared thermometer 301 reaches the maximum value. When the lens of the infrared thermometer 301 is facing the radiator 201, the specific correction method is as follows:

[0040] (1) Set the calibration device according to image 3 Fix as shown, start the blackbody furnace 2 and set the temperature to 1000°C;

[0041] (2) Turn on the cooling water of the sight glass 1 so that the space between the two sight mirror glasses 101 is filled with water. When the water flow in the cooling water interlayer 102 reaches a steady state, the temperature of the cooling water is 30°C, and the flow rate of the cooling water is 6L / min. ;

[0042] (3)...

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Abstract

The present invention discloses a sight glass used for temperature correction of an infrared thermometer, and a device for correction of an infrared thermometer. The device comprises a black-body furnace, a sight glass and an infrared temperature measurement device which are arranged in order at intervals. The black-body furnace is internally provided with a radiator; the sight glass comprises dual-layer glass of the sight glass and a cooling water interlayer between the dual-layer glass of the sight glass; and the infrared temperature measurement device comprises an infrared thermometer. Thepresent invention further discloses a method for correction of an infrared thermometer. Through correction of the infrared thermometer, an error between a measured temperature and an actual temperature of a silicon rod is controlled in a range of -3 DEG C to 3 DEG C, accurate measurement of the temperature of the silicon rod in a reducing furnace is achieved, and a requirement for accurate and stable control of the surface temperature of the silicon rod is met when zone-melting silicon production is performed; and moreover, the effect of the sight glass is to simulate a measurement condition that the infrared thermometer measures a production temperature of a polycrystalline silicon or a zone-melting silicon in the reducing furnace to allow the correction environment to be consistent to the actual measurement environment, and therefore the accuracy and the precision of the measured temperature of the infrared thermometer are ensured.

Description

technical field [0001] The invention relates to a calibration device and a calibration method for a thermometer, in particular to a calibration device and a calibration method for an infrared thermometer. Background technique [0002] In the production process of polysilicon produced by the Siemens method, the surface temperature of silicon rods is an important control parameter. Controlling a reasonable surface temperature of silicon rods can not only ensure a good surface shape of silicon rods, but also control the reduction power consumption at a lower level , while avoiding production accidents caused by abnormal temperature. At present, domestic solar-grade polysilicon production enterprises mostly judge the temperature based on the surface color of silicon rods based on experience. This method requires high personnel experience and cannot obtain quantitative data. The second is to use high-temperature infrared instrument measurement. This measurement method can Quanti...

Claims

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Application Information

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IPC IPC(8): G01J5/08
CPCG01J5/0803G01J5/80
Inventor 高召帅李钊于跃姜浩李福中沈棽
Owner 江苏鑫华半导体科技股份有限公司
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