Device and method for correction of infrared thermometer

A technology of infrared thermometers and calibration devices, which is applied to measuring devices, radiation pyrometry, instruments, etc., can solve problems such as the large deviation between the measured temperature and the actual temperature, and achieve the goal of ensuring accuracy, precision, and precise measurement Effect

Active Publication Date: 2018-06-08
江苏鑫华半导体科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Purpose of the invention: In order to solve the problem that there is a large deviation between the measured temperature and the actual temperature of the existing thermometers used to measure the product

Method used

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  • Device and method for correction of infrared thermometer
  • Device and method for correction of infrared thermometer
  • Device and method for correction of infrared thermometer

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0024] Example 1

[0025] A sight glass used for temperature correction of infrared thermometers, see figure 1 , Including double-layer mirror glass 101 and a cooling water interlayer 102 arranged between the double-layer mirror glass 101. The sight glass is fastened by a flange connection; the sight glass also includes a cooling water inlet 103 and a cooling water outlet 104.

[0026] A calibration device for infrared thermometers, see image 3 , Including a black body furnace 2, a sight glass 1 and an infrared temperature measuring device 3 arranged in a non-contact manner. The black body furnace is provided with a radiator 201. The sight glass 1 includes a double-layer sight glass 101 and a double-layer sight glass 101. The cooling water interlayer 102 between the mirror glass 101 (see figure 1 ), the infrared temperature measuring device 3 includes an infrared thermometer 301; the infrared rays emitted by the radiator 201 are collected on the infrared thermometer 301 through th...

Example Embodiment

[0031] Example 2

[0032] The flow of cooling water will affect the temperature distribution of the cooling water in the sight glass. When the cooling water flow is 1L / min, the actual operating condition of the reduction furnace is used as the boundary condition. The fluid mechanics simulation software is used to calculate the temperature distribution of the sight glass. According to the simulation results, the cooling water of the sight glass has obvious temperature gradient distribution, see Figure 4 If the cooling water flow rate is too small, it will cause the temperature measurement error due to the excessive cooling water temperature gradient. The reasonable cooling water flow rate is 5-10L / min.

[0033] Because the cooling water has an absorbing effect on infrared rays, that is, part of the energy emitted by the silicon rod is absorbed by the cooling water after passing through the sight glass, resulting in that the temperature measured by the infrared thermometer is lower t...

Example Embodiment

[0038] Example 3

[0039] According to the actual operating state of the reduction furnace, make image 3 In the calibration device of the infrared thermometer, the position of the infrared thermometer 301 needs to be adjusted when the temperature of the infrared thermometer is corrected. When the display temperature of the infrared thermometer 301 reaches the maximum value, the position of the infrared thermometer 301 is fixed. When the lens of the infrared thermometer 301 is facing the radiator 201, the specific correction method is as follows:

[0040] (1) Set the calibration device according to image 3 When the display is fixed, start the black body furnace 2 and set the temperature to 1000°C;

[0041] (2) Turn on the cooling water of the sight glass 1 so that the space between the two pieces of sight glass 101 is filled with water, until the water flow in the cooling water interlayer 102 is stabilized, at this time the temperature of the cooling water is 30°C, and the flow rate...

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Abstract

The present invention discloses a sight glass used for temperature correction of an infrared thermometer, and a device for correction of an infrared thermometer. The device comprises a black-body furnace, a sight glass and an infrared temperature measurement device which are arranged in order at intervals. The black-body furnace is internally provided with a radiator; the sight glass comprises dual-layer glass of the sight glass and a cooling water interlayer between the dual-layer glass of the sight glass; and the infrared temperature measurement device comprises an infrared thermometer. Thepresent invention further discloses a method for correction of an infrared thermometer. Through correction of the infrared thermometer, an error between a measured temperature and an actual temperature of a silicon rod is controlled in a range of -3 DEG C to 3 DEG C, accurate measurement of the temperature of the silicon rod in a reducing furnace is achieved, and a requirement for accurate and stable control of the surface temperature of the silicon rod is met when zone-melting silicon production is performed; and moreover, the effect of the sight glass is to simulate a measurement condition that the infrared thermometer measures a production temperature of a polycrystalline silicon or a zone-melting silicon in the reducing furnace to allow the correction environment to be consistent to the actual measurement environment, and therefore the accuracy and the precision of the measured temperature of the infrared thermometer are ensured.

Description

technical field [0001] The invention relates to a calibration device and a calibration method for a thermometer, in particular to a calibration device and a calibration method for an infrared thermometer. Background technique [0002] In the production process of polysilicon produced by the Siemens method, the surface temperature of silicon rods is an important control parameter. Controlling a reasonable surface temperature of silicon rods can not only ensure a good surface shape of silicon rods, but also control the reduction power consumption at a lower level , while avoiding production accidents caused by abnormal temperature. At present, domestic solar-grade polysilicon production enterprises mostly judge the temperature based on the surface color of silicon rods based on experience. This method requires high personnel experience and cannot obtain quantitative data. The second is to use high-temperature infrared instrument measurement. This measurement method can Quanti...

Claims

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Application Information

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IPC IPC(8): G01J5/08
CPCG01J5/0803G01J5/80
Inventor 高召帅李钊于跃姜浩李福中沈棽
Owner 江苏鑫华半导体科技股份有限公司
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