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Full flexible passive pressure sensor based on microdroplet, and manufacturing method thereof, and detection method thereof

The technology of a pressure sensor and a manufacturing method is applied in the direction of measuring fluid pressure, measuring fluid pressure through electromagnetic elements, instruments, etc., which can solve the problem of limited space for sensitivity improvement, and achieve the effect of improving measurement accuracy and strong resistance to parasitic capacitance.

Active Publication Date: 2018-06-15
SUZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In contrast, previously reported LC passive sensors can only respond to height changes between two parallel plates, so there is limited room for sensitivity improvement.

Method used

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  • Full flexible passive pressure sensor based on microdroplet, and manufacturing method thereof, and detection method thereof
  • Full flexible passive pressure sensor based on microdroplet, and manufacturing method thereof, and detection method thereof
  • Full flexible passive pressure sensor based on microdroplet, and manufacturing method thereof, and detection method thereof

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Embodiment Construction

[0048] The present invention will be specifically introduced below in conjunction with the accompanying drawings and specific embodiments.

[0049]A fully flexible passive pressure sensor based on micro-droplets, including: a two-layer conductive electrode 1 forming a sensing chamber, a sensing droplet 2 dropped in the sensing chamber, and sensor coils 3 arranged on both sides of the sensing chamber. The spacer layer 4 in the sensor coil 3 , the flexible cover film 5 covering the conductive electrode 1 and the sensor coil 3 , and a space 6 for the sensing droplet 2 to expand is provided in the sensing chamber. The sensor coil 3 comprises: an upper half coil 301, a lower half coil 302, a folded portion 303 between the upper half coil 301 and the lower half coil 302; the duty coil and the off duty coil are made of a polyimide film (Cu- PI film) after making a copper pattern and then folding it. As a preference, the two conductive electrodes 1 are two solid concentric circles. ...

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Abstract

The present invention discloses a full flexible passive pressure sensor based on microdroplet, and a manufacturing method thereof, and a detection method thereof. The full flexible passive pressure sensor based on the microdroplet comprises: two layers of conductive electrodes forming an induction cavity, a sensing liquid drop dropping into the induction cavity, sensor coils arranged at two sidesof the induction cavity, interval layers arranged in the sensor coils, and flexible covering films covering the conductive electrodes and the sensor coils, wherein the induction cavity is internally provided with a space used for expanding the sensing liquid drop. Under the external load effect, flexible covering films of the sensor are bent and deformed to compress the sensing liquid drop in thesensor to be expanded all around so as to change the capacitance value of the device; and moreover, corresponding change of the resonant frequency is converted to signals which can be detected by an external electromagnetic coupling coil, and the sensor is high in sensitivity, reliable in repeatability, high in stability, convenient to detect and high in detection precision.

Description

technical field [0001] The invention belongs to capacitive pressure sensing technology, in particular to a wearable pressure sensor, a manufacturing method and a detection method thereof. Background technique [0002] Today's emerging fields, such as health monitoring, robotics, and postoperative repair, have increasingly strong demands for accurate, compatible, and low-cost sensing technologies. Tactile perception has attracted increasing attention in academia and industry in recent years. Ismailova's group previously reported a method to integrate conductive polymers and ionic liquid gel mixtures onto knitted polyester substrates to form textile electrodes. When the electrodes are in contact with the skin, electrophysiological signals can be captured smoothly. In addition, the development of microfluidics, especially microdroplet technology, provides new ideas for flexible tactile sensing. Generally, microdroplets are defined as small droplets with diameters in the rang...

Claims

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Application Information

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IPC IPC(8): G01L1/14G01L9/00
CPCG01L1/142G01L9/0095
Inventor 聂宝清陈新建刘坚姚婷张忆秋
Owner SUZHOU UNIV
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