Fully flexible passive pressure sensor based on micro-droplets and its manufacturing method and detection method

Abstract

The present invention discloses a full flexible passive pressure sensor based on microdroplet, and a manufacturing method thereof, and a detection method thereof. The full flexible passive pressure sensor based on the microdroplet comprises: two layers of conductive electrodes forming an induction cavity, a sensing liquid drop dropping into the induction cavity, sensor coils arranged at two sidesof the induction cavity, interval layers arranged in the sensor coils, and flexible covering films covering the conductive electrodes and the sensor coils, wherein the induction cavity is internally provided with a space used for expanding the sensing liquid drop. Under the external load effect, flexible covering films of the sensor are bent and deformed to compress the sensing liquid drop in thesensor to be expanded all around so as to change the capacitance value of the device; and moreover, corresponding change of the resonant frequency is converted to signals which can be detected by an external electromagnetic coupling coil, and the sensor is high in sensitivity, reliable in repeatability, high in stability, convenient to detect and high in detection precision.

Description

technical field [0001] The invention belongs to capacitive pressure sensing technology, in particular to a wearable pressure sensor, a manufacturing method and a detection method thereof. Background technique [0002] Today's emerging fields, such as health monitoring, robotics, and postoperative repair, have increasingly strong demands for accurate, compatible, and low-cost sensing technologies. Tactile perception has attracted increasing attention in academia and industry in recent years. Ismailova's group previously reported a method to integrate a conductive polymer and ionic liquid gel mixture onto a knitted polyester substrate to form a textile electrode. When the electrodes touch the skin, electrophysiological signals can be captured smoothly. In addition, the development of microfluidics, especially microdroplet technology, provides new ideas for flexible tactile sensing. Generally, microdroplets are defined as small droplets with diameters in the range of several...

AI Technical Summary

Problems solved by technology

In contrast, previously reported LC passive sensors can only respond to height changes between two parallel plates, so there is limited room for sensitivity improvement.

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