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Micro-thermal sound transducer and preparation method thereof

A sound sensor, micro-thermal technology, used in instruments, measuring ultrasonic/sonic/infrasonic waves, measuring devices, etc., can solve the problems of poor sound pickup effect of sound sensors, and achieve the effect of improving sound pickup effect and avoiding signal interference.

Pending Publication Date: 2018-06-19
BEIJING NORTH GAOYE TECH CO LTD
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  • Abstract
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Problems solved by technology

[0003] The invention provides a micro-thermal sound sensor and its preparation method to solve the problem of poor sound pickup effect of the existing sound sensor

Method used

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  • Micro-thermal sound transducer and preparation method thereof
  • Micro-thermal sound transducer and preparation method thereof
  • Micro-thermal sound transducer and preparation method thereof

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Embodiment Construction

[0049] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0050] In the following description, a lot of specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways different from those described here, and those skilled in the art can do it without departing from the meaning of the present invention. By analogy, the present invention is therefore not limited to the specific examples disclosed below.

[0051] Secondly, the present invention is described in detail in combination with schematic diagrams. When describing the embodiments of the present invention in detail, for the convenience of explanation, the cross-sectional view showing the device structure will not be partially enlarged according to the gener...

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Abstract

The invention discloses a micro-thermal sound transducer and a preparation method thereof. The sound transducer comprises a thermal insulation substrate structure, a heating unit and a heat sensitiveunit. The heating unit and the heat sensitive unit are adjacent to each other and are arranged on the thermal insulation substrate structure. The heating unit is used for providing a local temperaturefield; and the heat sensitive unit is configured to detect a temperature change, caused by sound wave propagation, of the local temperature field and convert the temperature change into an electricalsignal or optical signal. Therefore, the sound pickup effect can be effectively improved.

Description

technical field [0001] The invention belongs to the technical field of sound sensors, in particular to a micro-thermal sound sensor and a preparation method thereof. Background technique [0002] An acoustic sensor is a transducer that converts an acoustic signal into a corresponding electrical signal. At present, the commonly used sound sensors mainly include capacitive and moving coil sound sensors. Taking the capacitive type as an example, the capacitance is changed by changing the distance between the two substrates of the capacitor through the sound pressure to detect sound waves. However, through mechanical deformation The sensitivity to detect sound waves is limited, and due to the frequency response problem caused by the Doppler effect, the sound pickup effect of the existing sound sensor is not good. Contents of the invention [0003] The invention provides a micro-thermal sound sensor and a preparation method thereof to solve the problem of poor sound pickup eff...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H17/00
CPCG01H17/00
Inventor 魏斌翟光杰李志刚翟光强
Owner BEIJING NORTH GAOYE TECH CO LTD
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