Silicon substrate integrated gas sensor

Abstract

The invention provides a silicon substrate integrated gas sensor. A gas sensor is integrated in a silicon substrate, the silicon substrate integrated gas sensor comprises a semiconductor device zone and a gas sensing zone in the silicon substrate, a slot formed by means of etching is formed in the gas sensing zone,an insulated layer is formed on each of the bottom and the side wall of the slot, the slot is square, a strip-shaped metal electrode is arranged the insulated layer on one side of the square at the bottom of the slot, vertically arranged thin metal electrodes are arranged in the insulated layer on the side wall of the slot, the array gas sensor is arranged on the insulated layer at the bottom art of the slot, the array gas sensor comprises a plurality of sensing sites arranged inarrays, the problem of integration of the gas sensor and a silicon based semiconductor chip is solved, the miniaturization of the gas sensor is realized, the function of gas sensing is directly integrated in the silicon based chip, the application of the gas sensor is expanded, and the performance is improved through the matching of studies on the material.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, in particular to a silicon substrate integrated gas sensor. Background technique [0002] Since the advent of gas sensitive components in the 1930s, it has been more than 70 years old, and its types have reached hundreds. At present, gas sensitive components involve many aspects of human production and life, and have been widely used in energy and resource development, environmental monitoring, national defense, aerospace and other fields, especially in the fields of gas category and concentration detection. Sensors that rely on traditional gas types and concentration detection often have the disadvantages of large size, low accuracy and slow response speed, which cannot meet the requirements of miniaturization and integration required by the current industry. Moreover, the thermal gas type and concentration sensors commonly used in the market today can only detect the gas type and concentra...

AI Technical Summary

Problems solved by technology

[0004] At present, gas sensors are formed separately, and additional independent devices are formed for various occasions. With the development of device manufacturing technology, this method can no longer meet the requirements of miniaturization. The feasibility of the application in the sensor, and can play a better effect, so if the gas sensor can be integrated with the semiconductor chip manufacturing through structural improvement, the application of the gas sensor can be further expanded, and through the cooperation with material research, Miniaturization and performance improvement of gas sensors

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