Double layer anti-sputter molecular sink with cylinder and its cooling method
A kind of anti-sputtering and molecular technology, which can be used in the testing of machine/structural components, instruments, measuring devices, etc., and can solve problems such as poor anti-sputtering ability
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Embodiment 1
[0042] Anti-sputter molecular sinking, including cooling liquid infusion pipe 22 and triangular fins, the cooling liquid infusion pipe is arranged in the triangular region surrounded by the triangular fins, the triangular fins are isosceles triangles, the base of the isosceles triangles and the Parallel to the axis of the cylinder where the anti-sputter molecular sink is installed.
[0043] A cooling pipeline is added to the anti-sputtering molecular sink to reduce the temperature of the wall surface, absorb xenon ions and various sputtering components in the plume, and achieve a better anti-sputtering effect. And it can block the products returned by the subsequent terminal anti-sputtering molecular sinking.
[0044] Specifically, an isosceles triangle has base angles that are less than 10°.
[0045] The fin angle designed for the anti-sputtering molecular sink at the secondary end can effectively prevent the influence of the products returned by the sputtering at the end an...
Embodiment 2
[0049] Such as figure 2 with Figure 7 As shown, a double-layer anti-sputtering molecular sink for the sputtering effect in the electric propulsion cabin applied in the vacuum chamber of the present invention includes a double-layer anti-sputtering molecular sink cylinder skeleton 1 and a cylinder cooling tube plate 2 , support pulley 3, end anti-sputtering molecular sink 21 and secondary end anti-sputtering molecular sinking 20, wherein the secondary end anti-sputtering molecular sinking 20 is the above-mentioned anti-sputtering molecular sinking, and the anti-sputtering molecular sinking includes the connection with the bulkhead The matching cylinder molecular sink, the end anti-sputtering molecular sink and the sub-end anti-sputtering molecular sink, the end anti-sputtering molecular sink 21 is fixed on the double-layer anti-sputtering molecular sink skeleton 1 by bolts, The anti-sputtering molecular sinker 20 at the sub-end and the double-layer anti-sputtering molecular ...
Embodiment 3
[0059] Apply the refrigeration method of the above-mentioned double-layer anti-sputtering molecular sink, such as image 3 As shown, specifically:
[0060] (1) Open the cylinder pipeline coolant control valve 801, the end molecular sink pipeline coolant control valve 802 and the skeleton pipeline coolant control valve 803, start the cooling cycle system, and flow to the double-layer anti-sputtering molecular sink pipeline The coolant is introduced, and at the same time, the pipeline temperature and cooling speed are adjusted by opening the cylinder pipeline coolant control valve 801, the end molecular sink pipeline coolant control valve 802 and the skeleton pipeline coolant control valve 803. When the temperature of the cooling tube sheet 2, the anti-sputtering molecular sink 21 at the end and the anti-sputtering molecular sink 20 at the secondary end reach the minimum, close the cooling liquid control valve 801 of the cylinder pipeline and the cooling liquid control valve 801...
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