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Conveying mechanism of processing apparatus

A processing device and conveying mechanism technology, applied in the direction of conveyor objects, transportation and packaging, electrical components, etc., can solve the problems of increased man-hours, increased processing costs, and increased burden of operators to achieve burden reduction and space saving Effect

Active Publication Date: 2018-06-29
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the transfer mechanism is omitted, it is necessary for the operator to transfer the workpiece before and after processing to the chuck table every time.
Therefore, the man-hours involved in the transportation increase, the burden on the operator, and the number of required personnel increase, which may lead to an increase in processing costs.

Method used

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  • Conveying mechanism of processing apparatus
  • Conveying mechanism of processing apparatus
  • Conveying mechanism of processing apparatus

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Embodiment Construction

[0025] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the constituent elements described below include those that can be easily conceived by those skilled in the art and those that are substantially the same. In addition, the structures described below can be combined appropriately. In addition, various omissions, substitutions, or changes in the structure can be made without departing from the scope of the present invention.

[0026] figure 1 It is a perspective view showing the outline of the processing apparatus provided with the conveyance mechanism of the processing apparatus of embodiment. figure 1 The shown processing device 1 is a processing device that performs cutting processing on a workpiece. Such as figure 1 As shown, the processing apparatus 1 has the chuck table 10, the processing u...

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PUM

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Abstract

Provided is a conveying mechanism of a processing apparatus which maintains the space saving of the processing apparatus and reduces the burden on an operator due to the conveyance of a workpiece. Theconveying mechanism (40) has a loading worktable (41) adjacent to a carry-in / out area (5) and supported by stacking the workpieces (W) via a spacer (S) at an area on a side of a processing feed unit(31); a unloading worktable (42) adjacent to the carry-in / out area, and supported by stacking the processed workpieces via a spacer at an area between the processing feed unit and the side opposite tothe loading worktable; and a conveying unit (50) having a workpiece holding portion and a spacer holding portion, carrying the workpiece and the spacer from the loading worktable, and carrying only the workpiece into a chuck worktable. The spacer that is carried out from the loading worktable and held in a supported state is superposed on the processed workpiece and is carried from the chuck table (10) to the unloading worktable.

Description

technical field [0001] The present invention relates to a conveying mechanism of a processing device. Background technique [0002] Conventionally, a cutting device and a laser processing device installed in a clean room have been used for dividing processing of various devices used in electronic equipment such as semiconductor devices, packaged devices, ceramic substrates, and glass substrates. For example, Patent Document 1 discloses a cutting device that has a cartridge mounting section for placing a cartridge on which a workpiece is placed, and carries a workpiece before and after cutting into or out of the cartridge by a carry-out member. It is preferable to achieve space-saving in such a processing apparatus for the purpose of reducing the construction cost and maintenance cost of the clean room. Patent Document 2 discloses that space saving of cutting devices is achieved by arranging adjacent cutting devices in close contact with each other or by sharing a piping are...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L21/304
CPCH01L21/304H01L21/67736H01L21/67739H01L21/67763
Inventor 福冈武臣
Owner DISCO CORP