Deflection type plane polishing device with wear compensation

Abstract

The invention discloses a deflection type plane polishing device with wear compensation. The deflection type plane polishing device with wear compensation comprises a holder used for containing an element and an annular polishing drive mechanism; the holder is used for carrying out pressure loading on the polishing disc face, and enables the element to be attached to the polishing disc face, the annular polishing drive mechanism drives the holder to rotate on the polishing disc face so as to enable the element to be subject to annular polishing machining, a deflection mechanism capable of driving the holder to carry out deflection motion along the polishing disc face is arranged, a polishing disc wear compensation block attached to the polishing disc face is arranged on the periphery of the holder. The element is subject to deflection polishing while being subject to annular polishing, annular marks of the element can be effectively restrained, the polishing disc wear compensation block is used for compensating force uneven wear of the polishing disc face in the radial direction, the face form long-term stability of the polishing disc face is kept, the element machining precision and face form consistency are improved, the holder is used for carrying out pressure loading on the polishing disc, uneven stress of the element edge can be reduced, and element side collapsing and corner collapsing can be avoided.

Description

technical field [0001] The invention relates to the technical field of polishing processing equipment, in particular to an eccentric plane polishing device with wear compensation. Background technique [0002] The traditional polishing method for large-aperture planar reflective components is to use full-aperture continuous polishing technology to control the reflected wavefront of the component by controlling the overall disk shape and the exposed edge of the component. However, this technology relies more on the experience of the processing personnel, indirectly controls the overall surface shape of the component through the correction and control of the overall surface shape of the disk surface, and controls the surface shape distribution of the edge of the component through the adjustment of the exposed edge amount of the component. It takes a long time to perform multiple measurements until the final index requirements are met, and the processing efficiency is low. [...

AI Technical Summary

Problems solved by technology

However, this technology relies more on the experience of the processing personnel, indirectly controls the overall surface shape of the component through the correction and control of the overall surface shape of the disk surface, and controls the surface shape distribution of the edge of the component through the adjustment of the exposed edge amount of the component. Carry out multiple measurements until the final index requirements are met, overall time-consuming and low processing efficiency

[0003] And in the traditional processing method, the component to be processed is placed directly on the surface of the polishing disc. Due to the elastic deformation of the polishing disc surface, the force on the corner of the large-diameter component will be higher than that in the middle area, resulting in the slump effect of the component; The local wear of the polishing disc surface will lead to the destruction of the surface shape of the polishing disc surface, resulting in uneven polishing pressure on the component processing surface, affecting the final processing surface shape accuracy of the component, and the processing surface shape distribution of the component is relatively poor; due to the component Periodic rotation movement at the same position, and periodic grooves on the polishing disc will produce obvious periodic ring marks on the surface of the component, resulting in deterioration of the intermediate frequency index of the component and seriously affecting the surface shape accuracy of the component

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