Metallic glass micron foil resistive strain sensor and preparation method thereof

A technology of resistive strain and metallic glass, which is applied in the field of material science and sensors, can solve the problems of plastic deformation and strain gauges that cannot be reused, and achieve the effects of improved range and performance, convenient commercial promotion, and strong compatibility

Inactive Publication Date: 2018-07-27
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although some strain gauges have a strain measurement limit as high as 20%, the strain gauges cannot be reused due to plas

Method used

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  • Metallic glass micron foil resistive strain sensor and preparation method thereof
  • Metallic glass micron foil resistive strain sensor and preparation method thereof
  • Metallic glass micron foil resistive strain sensor and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] Embodiment 1: preparation Zr 60 Cu 25 Al 10 Fe 5 Metallic glass is a uniaxial strain gauge with a sensitive grid (that is, a resistive strain sensor).

[0057] This embodiment adopts Zr 60 Cu 25 Al 10 Fe 5 Metallic glass foil, the sensitive grid of the uniaxial strain gauge with a resistance value of 350Ω is prepared after photolithography, and the base material is epoxy phenolic film. The strain gauge can be used for various force measuring and weighing sensors.

[0058] Specifically, the preparation steps of the uniaxial strain gauge are as follows:

[0059] 1. Preparation of film base

[0060] Zr with a thickness of 3 μm 60 Cu 25 Al 10 Fe 5 The metal glass foil 5 is fixed on a clean glass plate, and then the epoxy phenolic glue is dropped on the Zr 60 Cu 25 Al 10 Fe 5 The surface of the metal glass foil material 5 is sealed with an isolation cover, and after natural drying, the epoxy phenolic glue and the metal glass foil fixed on it are removed from ...

Embodiment 2

[0081] Example 2: Fe 31 co 31 Nb 8 B 30 Uniaxial shear strain gauge with metallic glass as sensitive grid

[0082] In this example, Fe 31 co 31 Nb 8 B 30 The metal glass foil is made of a sensitive grid of a uniaxial shear strain gauge with a resistance value of 350Ω after photolithography. The base material is made of epoxy phenolic film. The strain gauge can be used for shear sensors and torque sensors. Certainly, the base material may be any one of phenolic resin, epoxy resin, polyimide or glass fiber cloth, and is not limited to epoxy phenolic adhesive film.

[0083] Specifically, the preparation steps of the strain gauge are as follows:

[0084] 1. Preparation of film base

[0085] Fe with a thickness of 3 μm 31 co 31 Nb 8 B 30 The metal glass foil is fixed on a clean glass plate, and then the epoxy phenolic glue is dropped on the Fe with a straw. 31 co 31 Nb 8 B 30 Seal the surface of the metal glass foil with an isolation cover. After drying naturally, ...

Embodiment 3

[0105] Example 3: Zr 65 Al 10 Ni 10 Cu 5 Circular membrane strain gauge with metallic glass as sensitive grid

[0106] This embodiment adopts Zr 65 Al 10 Ni 10 Cu 5 Metallic glass foil, the sensitive grid of the circular membrane strain gauge with a resistance value of 350Ω is prepared after photolithography, and the base material is epoxy phenolic film. The strain gauge can be used as a pressure sensor for measuring fluid pressure.

[0107] Specifically, the preparation steps of the strain gauge are as follows:

[0108] 1. Preparation of film base

[0109] Zr with a thickness of 3 μm 65 Al 10 Ni 10 Cu 5 The metal glass foil is fixed on a clean glass plate, and then the epoxy phenolic glue is dropped on the Zr 65 Al 10 Ni 10 Cu 5 Seal the surface of the metal glass foil with an isolation cover. After drying naturally, remove the epoxy phenolic adhesive and the metal glass foil fixed on it from the glass plate, and then put it in an electric heating box for curi...

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Abstract

The invention provides a metallic glass micron foil resistive strain sensor and a preparation method thereof. The sensor comprises a substrate; a metal glass sensitive grid on the substrate; and a covering layer covering the metal glass sensitive grid, wherein the metal glass sensitive grid is prepared from a metal glass foil. The method comprises the following steps: preparing a film substrate; preparing the metal glass sensitive gate by photolithography; covering the protective film; and soldering a lead wire. According to the metallic glass micron foil resistive strain sensor, the metal glass foil is used as a sensitive material to improve the range and performance of a commercial conventional foil strain sensor, and realizes an ideal resistive strain sensor, and an ideal resistive strain sensor is achieved; and the preparation process is compatible with the existing foil strain gauge production process, thereby bringing convenience for the commercial promotion.

Description

technical field [0001] The invention relates to the field of material science and sensors, in particular to a resistive strain sensor using metallic glass micron foil as a strain-sensitive material and a preparation method thereof. Background technique [0002] Since Simmons and Ruge invented the resistance strain gauge composed of metal resistance wires in 1938, it has brought great convenience to the stress measurement and structural stress analysis of various engineering structures. In 1953, Jackson in the United Kingdom invented a metal foil strain gauge made of epoxy resin adhesive as the base and metal foil instead of metal wire, which fundamentally changed the production technology of the strain gauge. The commonly used foil thickness is 3 μm to 10 μm, and the thinnest foil thickness can reach 1 μm. Since the 1970s, foil strain gauges have gradually replaced wire strain gauges. Resistance strain gauges with metal foil as sensitive elements have been widely used in t...

Claims

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Application Information

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IPC IPC(8): B81B3/00B81C1/00G01B7/16
Inventor 赵杨勇王俊高海燕鞠江康茂东
Owner SHANGHAI JIAO TONG UNIV
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