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Device for receiving substrates in pairs

A technology for equipment and substrates, used in gaseous chemical plating, coatings, electrical components, etc., can solve problems such as unavailability, and achieve the effects of reducing thermal mass, reducing production costs, and improving temperature distribution

Inactive Publication Date: 2018-08-03
HANWHA Q CELLS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] A disadvantage of the devices known from the prior art is that the sheet-like substrate is arranged with its back side against a receiving area, usually formed in the form of a recess in a graphite plate
Since the coating volume is generally limited, the material passing through the graphite plate takes up space between back-to-back adjacent substrates, which cannot be used to coat other substrates

Method used

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  • Device for receiving substrates in pairs
  • Device for receiving substrates in pairs
  • Device for receiving substrates in pairs

Examples

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Embodiment Construction

[0049] exist figure 1 with figure 2 A first embodiment of the device according to the invention in the form of a plasma boat 1 for receiving sheet-like substrates 3 is shown in . A substrate 3 can be processed by means of a plasma boat 1 in a processing device (not shown), in particular a plasma CVD system (PECVD). In this case, the plasma boat 1 includes a holding device 5 for holding and fixing a substrate 3 in a holding area 7 .

[0050] In this case, two substrates 3, 3' are arranged in each receiving area 7, the rear side of the first substrate 3 directly abutting the rear side of the second substrate 3'. The receptacle 5 and the receptacle region 7 consist of or include an electrically conductive, refractory material, in this example graphite, which is inert to the process gas used in the PECVD system.

[0051] As shown, the accommodation area 7 of the accommodation device 5 is formed U-shaped and is designed and configured to accommodate two substrates 3, 3' arrange...

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Abstract

The present invention relates to a device for receiving plate-shaped substrates (3) for treating them in a treatment appliance in the form of a plasma CVD appliance (PECVD), wherein each substrate hasa front face and a rear face opposite the front face, comprising at least one receiving device (5, 5') for receiving and fixing the substrates (3, 3'), wherein the receiving device has at least two receiving areas (7), in particular a multiplicity of receiving areas (7), wherein at least two substrates (3, 3') are or can be arranged in each receiving area, wherein a rear face of a first substrate(3) is directly in contact with or can be brought directly into contact with a rear face of a second substrate (3'), and wherein at least two receiving areas (5) are arranged parallel, in particularalmost parallel, to each other and are connected to each other by means of insulating connection elements (19), and wherein the parallel receiving areas (5) are connected or connectable in alternationto the outputs of different polarity of a high-frequency generator.

Description

technical field [0001] The invention relates to a device, in particular a plasmaboot, for receiving sheet-shaped substrates, in particular solar cells, for processing the substrates in a processing device. Background technique [0002] Apparatus designed and configured to be capable of coating multiple substrates, eg in a plasma CVD system or the like, are known and described in the prior art. Such devices are also known as plasma boats. [0003] The plasma boat is used, for example, when coating solar cells with an antireflection coating of silicon nitride, doped and / or undoped silicon oxide and / or polysilicon. In order to coat the solar cells by means of the plasma-assisted gas deposition method, the solar cells are fastened to the plasma boat. For this purpose, plasma boats generally comprise a plurality of graphite plates arranged in parallel, which are arranged to be electrically insulated from each other and form a receiving area for the substrate. These graphite pl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/50C23C16/458H01L31/18H01L21/673H01J37/32
CPCC23C16/4587C23C16/50H01J37/32706H01J37/32715H01L21/67313H01L31/1876Y02P70/50
Inventor 克劳斯·东克尔
Owner HANWHA Q CELLS
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