Gas protection device and air shaft protection device
A gas protection device and protection gas technology, applied in the direction of safety devices, bearings, shafts and bearings, etc., can solve the problems of poor protection effect, low rotation accuracy of the air shaft, locking, etc., to ensure normal operation and reduce air shaft locking Dead, ensure the effect of rotation accuracy
Inactive Publication Date: 2018-08-07
BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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Problems solved by technology
[0005] The object of the present invention is to provide a gas protection device and an air shaft protection device to solve the problem that the gas protection device in the prior art has poor protection effect on the air shaft, and when the air source pressure is low, the air shaft rotation accuracy is low, and even Technical Problems with Locking Phenomenon
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[0026] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0027] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, ...
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The invention provides a gas protection device and an air shaft protection device and relates to the technical field of semiconductor air shaft protection devices. The gas protection device comprisesan air supply device, a protection gas supply device and a protection valve, wherein the protection valve is provided with an air inlet, a protection gas inlet and a gas outlet; the air supply deviceis communicated with the air inlet; the protection gas inlet is communicated with the protection gas supply device; the gas outlet on the protection valve is communicated with the air inlet or the protection gas inlet through switching a communication state of the protection valve; the air shaft protection device comprises semiconductor equipment and the gas protection device; the gas outlet of the gas protection device is communicated with an air cavity of the air shaft in the semiconductor equipment. The protection gas supply device is used for assisting to supply gas to the air shaft, gas pressure in an air gap of the air shaft keeps stable and normal operation of the air shaft is ensured, so that the rotation precision of the air shaft is ensured and a phenomenon that the air shaft islocked, caused by the fact that the gas pressure is low, is reduced.
Description
technical field [0001] The invention relates to the technical field of semiconductor air shaft protection devices, in particular to a gas protection device and an air shaft protection device. Background technique [0002] The air shaft is a rotating shaft that uses air (or other gases) as a lubricant. The air is less viscous than oil, high temperature resistant, and pollution-free. There is no contact between the shaft and the shaft seat, and the mechanical wear is small and the transmission accuracy is high. . [0003] Based on the advantages of the air shaft, the air shaft is a key component in the manufacturing process of semiconductor special equipment. Since the air shaft needs to continuously spray air and other gases into the shaft during the rotation process, the air shaft can only be in a certain air pressure environment to ensure the precise operation of the air shaft and reduce The mechanical collision between the air shaft and the shaft seat, etc. Therefore, the...
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Login to View More IPC IPC(8): F16C32/06F16N15/00
CPCF16C32/0614F16C32/0662F16N15/00F16N2260/02F16N2260/08F16N2260/12F16N2270/64F16N2270/70
Inventor 张文斌杨生荣张盼衣忠波王仲康白阳
Owner BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC