A deep learning-based flaw detection system and method
A defect detection and deep learning technology, applied in optical testing defects/defects, measuring devices, scientific instruments, etc., can solve the problems of weak generality and function expansion of the underlying algorithm, and many open parameters of image processing software, etc., and achieve maintenance costs. The effect of low, strong compatibility and less labor input
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Embodiment 1
[0040] Such as figure 1 As shown, a deep learning-based flaw detection system consistent with this embodiment includes:
[0041] The belt transmission device 5 is used to transmit the tested product (silicon wafer);
[0042] A line-scanning camera 1 and a lens 2 connected thereto are used to scan the tested product 6 on the belt conveyor 5, and send the collected product surface image to the PC host 7;
[0043] Preferably, a light source 3 is also included, which is arranged on the side of the measurement center line 4, and is used for supplementing light for the camera to ensure the accuracy of image collection.
[0044] The PC host 7 is provided with image processing software, which detects and processes defects through the image processing software, and simultaneously displays and uploads the processing results to the cloud 8;
[0045] The cloud 8 performs big data analysis.
[0046] Preferably, the image processing software includes the following modules:
[0047] The ...
Embodiment 2
[0062] Such as figure 2 As shown, on the basis of the embodiment, this embodiment provides a method for detecting defects based on deep learning, including the following steps:
[0063] S1: the line-scanning camera 1 scans the tested product 6 on the belt conveyor 5, and sends the collected surface image of the product to the image processing software;
[0064] S2: Use image processing software to detect and process flaws, and display and upload the processing results to the cloud 8 at the same time;
[0065] S3: Cloud 8 for big data analysis.
[0066] Preferably, the step S2 specifically includes:
[0067] S21: Preprocessing the picture, the preprocessing includes but not limited to grayscale transformation of the image and cropping of the image;
[0068] S22: Perform prediction through convolutional neural network degree images, and obtain prediction results;
[0069] S23: Process the prediction result and obtain the processed picture;
[0070] S24: Display the process...
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