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A deep learning-based flaw detection system and method

A defect detection and deep learning technology, applied in optical testing defects/defects, measuring devices, scientific instruments, etc., can solve the problems of weak generality and function expansion of the underlying algorithm, and many open parameters of image processing software, etc., and achieve maintenance costs. The effect of low, strong compatibility and less labor input

Active Publication Date: 2021-06-11
TZTEK TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] 1. Image processing software has many open parameters, and it takes a lot of effort to debug to achieve better detection performance
[0004] 2. The underlying algorithms of image processing software are weak in versatility and function expansion. For new products and new needs of customers, personnel are required to redevelop

Method used

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  • A deep learning-based flaw detection system and method
  • A deep learning-based flaw detection system and method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Such as figure 1 As shown, a deep learning-based flaw detection system consistent with this embodiment includes:

[0041] The belt transmission device 5 is used to transmit the tested product (silicon wafer);

[0042] A line-scanning camera 1 and a lens 2 connected thereto are used to scan the tested product 6 on the belt conveyor 5, and send the collected product surface image to the PC host 7;

[0043] Preferably, a light source 3 is also included, which is arranged on the side of the measurement center line 4, and is used for supplementing light for the camera to ensure the accuracy of image collection.

[0044] The PC host 7 is provided with image processing software, which detects and processes defects through the image processing software, and simultaneously displays and uploads the processing results to the cloud 8;

[0045] The cloud 8 performs big data analysis.

[0046] Preferably, the image processing software includes the following modules:

[0047] The ...

Embodiment 2

[0062] Such as figure 2 As shown, on the basis of the embodiment, this embodiment provides a method for detecting defects based on deep learning, including the following steps:

[0063] S1: the line-scanning camera 1 scans the tested product 6 on the belt conveyor 5, and sends the collected surface image of the product to the image processing software;

[0064] S2: Use image processing software to detect and process flaws, and display and upload the processing results to the cloud 8 at the same time;

[0065] S3: Cloud 8 for big data analysis.

[0066] Preferably, the step S2 specifically includes:

[0067] S21: Preprocessing the picture, the preprocessing includes but not limited to grayscale transformation of the image and cropping of the image;

[0068] S22: Perform prediction through convolutional neural network degree images, and obtain prediction results;

[0069] S23: Process the prediction result and obtain the processed picture;

[0070] S24: Display the process...

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Abstract

The invention discloses a defect detection system based on deep learning, comprising: a belt transmission device, a line-scanning camera and a lens connected thereto, a PC host and a cloud; the PC host is provided with image processing software, and through the image processing software Perform flaw detection and processing, and display and upload the processing results to the cloud for big data analysis. The invention also discloses a defect detection method based on deep learning. The invention introduces the AI ​​algorithm of deep learning to identify and extract the features of defects in the picture with high efficiency and high recognition rate. Less labor input, low maintenance cost for image processing software detection performance. Strong compatibility, in the face of product upgrades, image processing software algorithms do not need to be developed separately, just collect more product samples for learning and training, and can quickly meet the flaw detection application of new products.

Description

technical field [0001] The present invention relates to the technical field of flaw detection, in particular to a flaw detection system and method based on deep learning. Background technique [0002] In the industrial production process, defect detection is an important step in many product quality inspection links. The defect detection device uses the image processing software to identify and process the product surface image collected by the industrial camera to find out the defects, and at the same time effectively classify and follow-up the defects. Traditional image processing software has several problems: [0003] 1. Image processing software has many open parameters, and it takes a lot of effort to debug to achieve better detection performance. [0004] 2. The underlying algorithms of image processing software are weak in versatility and function expansion. For new products and new needs of customers, personnel are required to redevelop them. [0005] Therefore, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/88
CPCG01N21/8851G01N2021/8887
Inventor 曹葵康邵新华杨晓冬殷浩崔学理
Owner TZTEK TECH