Monolithic Si-based micro-pressure sensor and manufacturing method thereof
A micro-pressure sensor, silicon-based technology, applied in the field of sensing, can solve problems such as device failure, low yield, and low yield, achieving good sensitivity consistency, overcoming self-weight effects, and good thickness consistency Effect
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[0042] refer to image 3, a kind of monolithic silicon-based micro-pressure sensor of the present invention, comprises silicon wafer main body, and silicon wafer main body comprises the silicon substrate 1 and elastic silicon membrane 2 that are bonded together mutually, between silicon substrate 1 and elastic silicon membrane 2 A first silicon dioxide layer 3 is provided, an etching pit 4 is provided in the silicon substrate 1, a back island structure is provided in the etching pit 4, and the back island structure includes a back island 5 for stable measurement and a wrapped back island 5 The corrosion self-terminating structure is provided, wherein the thickness of the back island 5 is in the range of 60-80 microns. Specifically, among the etch pits 4 arranged in the silicon substrate 1, a back island structure is arranged, and in the back island structure, there are back islands 5 for stable measurement and the etch self-disposed wrapping back islands 5. Termination struct...
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