5results about How to "Good thickness consistency" patented technology

This invention relates to a composite polishing structure design and polishing method for wafer-level polishing processes. The composite polishing structure design includes a disk body with a positioning groove at the center of its upper end. An upper Tesla groove, a lower Tesla groove, and an annular channel are arranged on the disk body around the positioning groove. The upper and lower Tesla grooves are arranged in a circumferentially spaced array and extend radially. The upper and lower Tesla grooves are arranged vertically and circumferentially adjacent. The inner ends of both the upper and lower Tesla grooves penetrate the positioning groove, and their outer ends penetrate the outer circumferential surface of the disk body. The annular channel is arranged in a radially spaced ring around the disk body and penetrates both the upper and lower Tesla grooves. This invention forms an integrated fluid guidance and waste chip discharge channel through the double-layer Tesla grooves, improving the utilization efficiency and chip removal capacity of the polishing fluid.

The utility model discloses a multifunctional device for controlling the constant temperature of a film blowing machine for mulching film processing, and relates to the technical field of mulching film processing equipment. The device comprises a support, a bottom plate is fixedly connected to the inner bottom of the support, and an extrusion barrel is fixedly connected to an inner cavity of the support; a switching assembly is arranged at the top of the bottom plate and comprises a supporting frame fixedly connected to the top of the bottom plate and a first lead screw movably connected to one side of an inner cavity of the supporting frame. Through the synergistic effect of the switching assembly and the clamping assembly, a standby heating system can be rapidly switched when main constant-temperature equipment breaks down, shutdown replacement is not needed, the production interruption time is remarkably shortened, it is ensured that the heating device is tightly attached to the extrusion barrel through the magnetic attraction and clamping design of the closed ring, stable heat transfer is maintained, and it is ensured that the plastic melting temperature is uniform; therefore, the thickness consistency of mulching film finished products is improved, the rejection rate is reduced, and the overall production efficiency is improved.

The utility model relates to the technical field of semiconductor manufacturing equipment, specifically disclose a tray structure for silicon carbide epitaxial equipment, including tray base, the concentric circle arrangement of multiple wafer bearing positions is provided with in the upper end surface of circular tray base, each wafer bearing position is the recessed structure of ladder, including embedding setting bottom support ring in the upper end of circular tray base, the inclined transition surface is connected with the upper surface of tray base the outer edge of bottom support ring's upper end surface, through recessed bearing position structure of ladder, the risk of wafer thermal deformation breakage is reduced significantly, radial flow guide groove optimizes reaction gas radial distribution uniformity, and the composite structure of graphite matrix and silicon carbide coating and the processing of round corner edge are matched, effectively improve the anti -peeling ability of coating and equipment service life under high temperature working condition, finally realize the synchronous improvement of epitaxial layer thickness consistency and production yield.

The invention discloses a processing method of an aluminum oxide electrostatic chuck, and aims to overcome the defect that the connection failure is easy to occur when the electrostatic chuck is used for a long time. The method comprises the following steps: S1, selecting two substrates, and processing a high-voltage electrode groove on one substrate; s2, coating bonding slurry on the surface of a substrate close to the edge, and drying; s3, the two substrates are attached together and assembled into a furnace, diffusion welding is achieved after the slurry is heated, the two substrates are connected into a disc body, and an electrode cavity is formed in the high-voltage electrode groove; s4, conducting resin is poured into the electrode cavity in a vacuum mode. According to the processing of the electrostatic chuck, high-strength integration of the aluminum oxide ceramic and the internal conductive adhesive functional layer is realized, the problem of connection failure of the electrostatic chuck caused by decomposition or aging of an adhesive at a high temperature is avoided, the overall performance of the electrostatic chuck is improved, and the service life of the electrostatic chuck is prolonged.

The invention belongs to the technical field of grinding of grinding tools, and discloses a brittle corrosion-resistant metallic bond, a metallic bond superhard grinding wheel and a preparation method of the metallic bond superhard grinding wheel. The brittle corrosion-resistant metal bonding agent prepared by the invention comprises the following raw materials in parts by weight: 50-70 parts of copper powder, 5-20 parts of tin powder, 5-15 parts of graphite powder and 15-20 parts of an improvement additive. Graphite powder and an improvement additive are added into a traditional bronze-based metal binding agent, secondary heat treatment is carried out, the plasticity of the binding agent is reduced, the brittleness and hardness of the binding agent are improved, brittle fracture can occur in time, and the workpiece quality cannot be affected; through secondary heat treatment, elements in the improvement additive form a uniform and compact protective film on the grinding wheel, internal metal can be continuously prevented from being corroded in the whole life cycle of the grinding wheel, and the thickness consistency problem caused by corrosion of the side face in the using process of the grinding wheel is solved. The brittleness and corrosion resistance of the bronze-based metal bonding agent are improved on the premise that the cost is not obviously increased.