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Torsion type precision piezoelectric actuator using shear working mode and method of making the same

A technology of piezoelectric actuators and shearing work, which is applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., and can solve the problem of insufficient precision and the types of rotary precision piezoelectric actuators Single, cumbersome production process and other problems, to achieve the effect of precise angle positioning, simple and flexible processing and production

Active Publication Date: 2019-11-08
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the technical problems of the existing rotary precision piezoelectric actuators such as single type, complex structure, high cost, insufficient precision and cumbersome manufacturing process, the present invention proposes a torsional precision piezoelectric actuator adopting a shearing working mode and its Production Method

Method used

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  • Torsion type precision piezoelectric actuator using shear working mode and method of making the same
  • Torsion type precision piezoelectric actuator using shear working mode and method of making the same
  • Torsion type precision piezoelectric actuator using shear working mode and method of making the same

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specific Embodiment approach 1

[0030] Specific implementation mode one: the following in conjunction with the description attached figure 1 , figure 2 , image 3 , Figure 4 , Figure 5 , Figure 6This embodiment will be further described in detail. This embodiment provides a torsional precision piezoelectric driver in shear working mode in which piezoelectric ceramics are polarized along the axial direction of the driver. Its appearance is circular; the driver includes two layers of Actuating unit 1, each layer of actuating unit 1 includes 16 piezoelectric ceramics 2 and 16 energized electrode sheets 3; the cross section of the piezoelectric ceramics 2 is fan-shaped; the piezoelectric ceramics 2 includes 8 positive The polarized first piezoelectric ceramics 2-1 and the eight negatively polarized second piezoelectric ceramics 2-2 have their polarization directions along the axis of the driver and opposite to each other.

[0031] The piezoelectric ceramics 2 and the energized electrode pieces 3 are ar...

specific Embodiment approach 2

[0032] Specific implementation mode two: below in conjunction with description Figure 7 , Figure 8 , Figure 9 , Figure 10 , Figure 11 , Figure 12 This embodiment will be further described in detail. Similar to Embodiment 1, this embodiment provides a torsional precision piezoelectric driver in shear working mode with piezoelectric ceramics polarized along the radial direction of the driver. Its appearance is circular; the driver includes two Layers of actuating units 1 arranged radially, each layer of actuating units 1 includes 16 piezoelectric ceramics 2 and 16 energized electrode pieces 3; the cross section of the piezoelectric ceramics 2 is fan-shaped; the piezoelectric ceramics 2 The ceramic 2 includes 8 positively polarized first piezoelectric ceramics 2-1 and 8 negatively polarized second piezoelectric ceramics 2-2, and their polarization direction is along the radial direction of the driver and the polarization direction is opposite .

[0033] The piezoelec...

specific Embodiment approach 3

[0036] Specific implementation mode three: the following in conjunction with the description Figure 13 This embodiment will be further described in detail. This embodiment provides a manufacturing process flow of a torsional precision piezoelectric driver adopting a shearing working mode. This embodiment mainly includes the molding and sintering of the piezoelectric ceramic 2, the polarization of the piezoelectric ceramic 2, the machining of the piezoelectric ceramic 2 and the upper electrode, and the assembly of the piezoelectric ceramic 2 and the energized electrode sheet 3 into a layer of the driver. Process of actuating unit 1.

[0037] The molding and sintering of the piezoelectric ceramic 2 may include processes such as batching, mixing, pre-firing, crushing, molding, debinding, and sintering according to different process equipment. Electroceramic blanks are used for subsequent polarization and processing. The polarization of the piezoelectric ceramic 2 needs to be ...

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Abstract

The invention provides a torsion precision piezoelectric actuator adopting a shear deformation mode and a manufacturing method thereof, and belongs to the field of piezoelectric actuation and solves the problems of complex structure, high cost and tedious manufacturing and the like of an existing rotary precision piezoelectric actuator. The actuator is cylindrical or circular in shape, and is formed by piezoelectric ceramics and power-on electrode slices. The polarization direction of the piezoelectric ceramics can be divided into polarization in axial and radial directions of the actuator; and under each situation, the piezoelectric ceramics can be divided into positive polarization and negative polarization piezoelectric ceramic groups. When an excitation voltage is applied to the power-on electrode slices, the piezoelectric ceramics have shear deformation, and precise angular displacement can be output through structure design and appropriate connection. The manufacturing process ofthe actuator comprises manufacturing of the piezoelectric ceramics and the power-on electrode slices and assembling of the actuator; and the manufacturing process can be adjusted flexibly according to application occasions, processing conditions and performance indexes and the like, and is convenient for batch production.

Description

technical field [0001] The invention belongs to the field of piezoelectric drive technology, in particular to a torsional precision piezoelectric driver adopting a shearing working mode and a manufacturing method thereof. Background technique [0002] With the rapid development of precision ultra-precision machining, precision optics, microelectronics, life science and technology, precision measurement, intelligent devices and other fields, the requirements for driving technology of micro-nano level positioning accuracy are also getting higher and higher, and various research institutions are also Extensive and in-depth research has been carried out in this field. In these fields, it is difficult for traditional electromagnetic motors to meet stringent performance index requirements, while piezoelectric actuators have the advantages of simple structure, small size, high precision, fast response, large output, low energy consumption, large electromechanical conversion coeffic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/10H02N2/12H02N2/00
CPCH02N2/10H02N2/12H02N2/22
Inventor 刘英想于洪鹏陈维山刘军考
Owner HARBIN INST OF TECH
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