Atomic beam microscope device

Abstract

The invention relates to the technical field of microscopy for materials. The atomic beam microscope device comprises a gas storage tank, a gas pipe, a vacuum chamber formed by connection of a chamberI and a chamber II, an injector head, a shunt, a gas transmission window sheet, an atom diffraction plate, an atom diffraction plate through hole variety I, an atom diffraction plate through hole variety II, an atom diffraction plate through hole variety III, a detector I, a sample, a sample table, a computer, a detector II, an extraction opening I, a vacuum pump set I, an extraction opening II and a vacuum pump set II. According to the invention, for the atom diffraction plate, a series of through holes are adopted to replace the cyclic structure of a zone plate, the through holes are easierin processing than the cyclic structure without support of a standard fresnel zone plate, and the focusing effect of atomic beam current is optimized by selecting proper through hole diameter and through hole distribution, so as to obtain sharp focusing beam spots and inhibit diffraction of a higher order.

Description

technical field [0001] The invention relates to the field of microscopic technology for materials, in particular to an atomic beam microscopic device which uses atomic beams to scan the surface of a sample and has a specially designed atomic diffraction sheet. Background technique [0002] In the field of microscopic technology, the existing electron microscope can only image conductive samples, and the electron beam emitted by the electron microscope is of high energy, which will cause some sensitive sample surfaces to be damaged by radiation. The atomic beam microscope can overcome the above defects and image fragile or insulating samples. It usually uses inert gas atoms as the emitting atoms. The energy of the atomic beam of the inert gas is very low and its chemical properties are very stable. Obtain an image of the surface of the sample. The working principle of the atomic beam microscope is: in a high vacuum, the free atomic flow passes through the nozzle and the aper...

AI Technical Summary

Problems solved by technology

[0003] The defect of the existing technology is that in a working mode of the atomic beam microscope, the Fresnel zone plate is used to focus the atoms in the form of de Broglie matter waves, and the ultimate resolution is determined by the outermost part of the Fresnel zone. Due to the low energy of the atomic beam, the atoms will not penetrate the solid material, so the ring used to transmit the atoms on the Fresnel zone plate must adopt an unsupported structure, which is relatively difficult in processing. It is very difficult, and the focusing effect of the atomic beam is not good enough, and the beam spot will be interfered by high-order diffraction. The atomic beam microscopic device can solve the problem

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