The invention relates to the technical field of microscopy for materials. The atomic beam microscope device comprises a gas storage tank, a gas pipe, a vacuum chamber formed by connection of a chamberI and a chamber II, an injector head, a shunt, a gas transmission window sheet, an atom diffraction plate, an atom diffraction plate through hole variety I, an atom diffraction plate through hole variety II, an atom diffraction plate through hole variety III, a detector I, a sample, a sample table, a computer, a detector II, an extraction opening I, a vacuum pump set I, an extraction opening II and a vacuum pump set II. According to the invention, for the atom diffraction plate, a series of through holes are adopted to replace the cyclic structure of a zone plate, the through holes are easierin processing than the cyclic structure without support of a standard fresnel zone plate, and the focusing effect of atomic beam current is optimized by selecting proper through hole diameter and through hole distribution, so as to obtain sharp focusing beam spots and inhibit diffraction of a higher order.