Device and method for directly measuring interfacial contact resistivity

A technology of contact resistivity and interface, applied in measuring devices, measuring resistance/reactance/impedance, measuring electrical variables, etc., it can solve the problems of diffusion and inability to reflect well, and achieve simple operation and machine vision positioning. , the effect of accurate positioning

Active Publication Date: 2018-09-07
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For thermoelectric elements, the interface usually includes a sandwich structure composed of thermoelectric materials, barrier layers, transition layers, solder, and electrodes. Diffusion behavior may appear on the interface, and existing testing methods and systems cannot reflect this change well

Method used

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  • Device and method for directly measuring interfacial contact resistivity
  • Device and method for directly measuring interfacial contact resistivity
  • Device and method for directly measuring interfacial contact resistivity

Examples

Experimental program
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Embodiment 1

[0094] A device for directly measuring interfacial contact resistivity of the present invention measures a P-type CoSb below in conjunction with the examples and accompanying drawings 3Interfacial contact resistivity of basal cobalt ore thermoelectric elements.

[0095] Step 1: Preparation including thermoelectric material CeFe 3.85 mn 0.15 Sb 12 , Barrier layer Ti 88 al 12 , and electrode Ni CeFe 3.85 mn 0.15 Sb 12 / Ti 88 al 12 / Ni block with a thickness of 8mm, cut to obtain a cross-sectional area of ​​3×3mm 2 The thermoelectric element, the two ends and the upper surface are ground flat, and the actual cross-sectional dimensions measured by a caliper are 3.02mm and 2.98mm. Use tweezers to install the thermoelectric element on the sample test fixture, which is located between the first electrode and the second electrode. , so that the surface to be tested is placed horizontally, and then the thermoelectric element is clamped.

[0096] Step 2: Collect the surface i...

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Abstract

The invention provides a device and method for directly measuring the interfacial contact resistivity. The device comprises a probe test platform, a resistivity measurement unit and a control unit, wherein the probe test platform is used for controlling a test probe to conduct voltage sweep testing on the surface of a to-be-measured sample, and the probe test platform comprises a sample testing clamp used for clamping the to-be-measured sample, an electric probe base used for driving the test probe to move, an image collector used for collecting surface images of the to-be-measured sample, anda base plate used for fixing the sample testing clamp, the electric probe base and the image collector; the resistivity measurement unit is connected with the sample testing clamp; the control unit is connected with the electric probe base and the image collector of the probe test platform, and is connected with the resistivity measurement unit. By means of the device, the interfacial contact resistivity can be directly measured at a high precision.

Description

technical field [0001] The invention belongs to the field of electrical performance measurement, and in particular relates to a device and method for directly measuring interface contact resistivity. Background technique [0002] In the manufacture of electronic components, especially semiconductor components, the size of the contact resistivity between various materials directly affects the performance of components and reflects the technological level of device manufacturing. The measurement of contact resistance and contact resistivity is an important index in the process of manufacturing and performance characterization of various electronic components, especially semiconductor components. It is very necessary to measure contact resistivity accurately, conveniently and quickly. [0003] Taking thermoelectric conversion technology as an example, as an energy technology that uses the Seebeck effect to directly convert heat energy into electrical energy, it has the advantag...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R27/08G01B11/00
CPCG01B11/00G01R27/08
Inventor 廖锦城夏绪贵顾明张骐昊吴汀柏胜强陈立东
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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