A rocking vibration device

Abstract

The invention discloses a novel rocking vibration device, comprising a first rocking vibration body and a second rocking vibration body which are horizontally arranged; the intersection position of acenter line of the left side face of the first rocking vibrating body and a center line of a mirror surface is fixedly connected with a base by means of a first torsion spring; the second rocking vibration body is positioned at the right side position of the first rocking vibrating body; the intersection position of a center line of the right side face of the first rocking vibrating body and the center line of the mirror surface is connected with the intersection position of a center line of the left side face of the second rocking vibrating body and the center line of the mirror surface by means of second torsion springs which are horizontally distributed; the first rocking vibration body is provided with a first reflective lens and a first rotary inertia adjustment balancing weight; thesecond rocking vibration body is provided with second reflective lens and a second rotary inertia adjustment balancing weight. The novel rocking vibration device can effectively adjust the inherent frequency of a rocking vibration body so as to enable the inherent frequency to be consistent with the vibration frequency of a preset target meeting the requirements of exposure equipment or to be within a preset difference value range, thus improving the illumination effect of the exposure equipment.

Description

technical field [0001] The invention relates to the field of mechanical technology, in particular to a rocking vibration device. Background technique [0002] At present, point light sources are mostly used in exposure equipment such as photolithography machines manufactured by semiconductors. In a vacuum state, the light emitted by the point light source is reflected by the lens many times to achieve uniform distribution of illumination. However, after multiple reflections, it will inevitably cause light The loss of energy reduces the utilization rate of light energy. For this reason, at present, the commonly used method is to fix the reflector on the rocking vibrating body, and then install the reflecting mirror and the rocking vibrating body together in the vacuum optical path for passing the light emitted by the point light source, and through the rocking vibration The body drives the reflector to vibrate at high frequency to realize the rapid change of the angle of the...

AI Technical Summary

Problems solved by technology

[0004] However, for the current rocking vibrating body, its own natural frequency cannot be adjusted flexibly, so that it cannot be consistent with the preset target vibration frequency that meets the requirements of the exposure equipment or within a preset difference range (for example, ±1%) It meets the production requirements of exposure equipment such as lithography machines, and improves the production quality and lighting effect of exposure equipment

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