Microphone and method of making the same

Abstract

The invention discloses a microphone and a manufacturing method thereof. The manufacturing method of the microphone provided by the invention comprises the following steps: providing a front-end structure; forming a first backboard layer on the front-end structure; forming a first interval layer on the first backboard layer, wherein the first interval layer is provided with a first sacrifice part;forming a vibration film layer on the first interval layer; forming a second interval layer on the vibration film layer, wherein the second interval has a second sacrifice part, and the second sacrifice part is corresponding to the first sacrifice part; forming a second backboard layer on the second interval layer; and removing the second sacrifice part and the first sacrifice part, and forming abase. Since the acquired microphone is the dual-backboard structure, an amplification signal is increased, the APT performance is improved, and the microphone can reply various encapsulation modes; and the dual-backboard structure can eliminate the undercutting of the interval layer and the backboard, and the electromechanical corrosion influence is reduced.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a microphone and a manufacturing method thereof. Background technique [0002] A microphone is a sensing device that can convert sound energy into electrical energy. The principle of a capacitive microelectromechanical system (Condenser MEMS) microphone is to cause the vibration of the vibration mode through sound pressure, and then change the capacitance to cause a change in voltage. Today, with the development of technology and the continuous growth of demand, people's demand for Condenser MEMS microphones is also increasing, especially the demand for microphones with high signal-to-noise ratio is growing rapidly. [0003] Generally speaking, the package of the microphone has two modes according to the way of air intake. The bottom type (bottom type) has a larger back cavity (Back volume) than the top type (top type), which also means that the microphone of the bottom ty...

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Problems solved by technology

[0003] Generally speaking, the package of the microphone has two modes according to the way of air intake. The bottom type (bottom type) has a larger back cavity (Back volume) than the top type (top type), which also means that the bottom type microphone has a larger volume. High SNR (signal-to-noise ratio), but poor microphone air pressure test (APT) performance in bottom mode

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