High-precision air flow control type stable film forming method using glue spinning machine

Abstract

The invention discloses a high-precision air flow control type stable film forming method using a glue spinning machine. The method comprises the following steps that 1, a substrate is placed; 2, thedisc surface of a heating and rotating loading disc starts to rotate after reaching the specified temperature, and the airflow starts to rotate and sink from the periphery of the heating and rotatingloading disc under rotation driving of the heating and rotating loading disc; 3, the airflow after sinking is circulated from the interior of a spinning coating inner cavity to the position below an upper cover after being weakened in rotating in the spinning coating inner cavity, and then the airflow passes through a flow guide step to be weakened, and then is blown to an exhaust hole in the topof the upper cover under the guidance of a conical surface; and 4, after a part of the gas is discharged through the exhaust hole, the airflow which is finally left in a heating rotating cavity is blown from the position above the upper cover to the disc surface of the heating and rotating carrying disc again to assist the glue spinning machine in throwing away a glue solution on the surface. According to the high-precision air flow control type stable film forming method using the glue spinning machine, the airflow in the glue spinning machine can be controlled so that the film forming quality can be improved.

Description

technical field [0001] The invention relates to a method for stabilizing the airflow control of a high-precision glue homogenizer, in particular to a film-forming method with a structure applied to a glue homogenizer, which can reduce airflow disturbance and ensure the glue homogenization effect, and belongs to the photoelectric technology field. Background technique [0002] Previously, the airflow disturbance of the homogenizer during the spin coating process had a great influence on the film quality; some companies even developed a kind of "use airflow to control the uniformity of photoresist film thickness" as shown in Chinese patent 201510415328.4 (2015.7.15). It can be seen that how to control the gas disturbance is the key factor of the film forming quality; however, the air flow in the heating and rotating chamber of the conventional glue leveling machine is chaotic, which seriously affects the film forming quality. Contents of the invention [0003] The purpose o...

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Problems solved by technology

[0002] Previously, the airflow disturbance of the homogenizer during the spin coating process had a great influence on the film quality; some companies even developed a kind of "use airflow to control the uniformity of the photoresist film thickness" as shown in Chinese patent 201510415328.4 (2015.7.15). It can be seen that how to control the gas disturbance is the key factor of the film quality; however, the air flow in the heating and rotating chamber of the conventional glue homogenizer is chaotic, which seriously affects the film quality

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